2010
DOI: 10.1016/j.conengprac.2010.04.002
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Identification of nonlinear dynamic models of electrostatically actuated MEMS

Abstract: This paper focuses on the identification of nonlinear dynamic models for physical systems such as electrostatically actuated micro-electro-mechanical systems (MEMS). The proposed approach consists in transforming, by means of suitable global operations, the input-output differential model in such a way that the new equivalent formulation is well adapted to the identification problem, thanks to the following properties: first, the linearity with respect to the parameters to be identified is preserved, second, t… Show more

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Cited by 5 publications
(2 citation statements)
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“…Note that, as the linear operator ϕxm,Amϵ depends on the noise, some of the classical estimators (as the least squares one mentioned previously) can be biased . Some bias reduction methods can be used to mitigate this problem.Remark This identification method can easily be extended, up to simple technical adaptation, to the case where function g is different from one trajectory to the other, that is gx:=()gixii=1:I. In such cases, the cancellation of the function g is only possible for j = i ; thus, only the sets normalΩx,ϵi,i will be used, which implies that the difference operator D x , ϵ will be given by ()Dx,ϵi,ii=1:I0.3em.…”
Section: Description Of the Identification Methodsmentioning
confidence: 99%
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“…Note that, as the linear operator ϕxm,Amϵ depends on the noise, some of the classical estimators (as the least squares one mentioned previously) can be biased . Some bias reduction methods can be used to mitigate this problem.Remark This identification method can easily be extended, up to simple technical adaptation, to the case where function g is different from one trajectory to the other, that is gx:=()gixii=1:I. In such cases, the cancellation of the function g is only possible for j = i ; thus, only the sets normalΩx,ϵi,i will be used, which implies that the difference operator D x , ϵ will be given by ()Dx,ϵi,ii=1:I0.3em.…”
Section: Description Of the Identification Methodsmentioning
confidence: 99%
“…Note that, as the linear operator " x m ;A m depends on the noise, some of the classical estimators (as the least squares one mentioned previously) can be biased [1]. Some bias reduction methods [35][36][37] can be used to mitigate this problem.…”
Section: Remark 32mentioning
confidence: 99%