Identification of Water Molecules in Low Humidity and   Possibility of Quantitative Gas Analysis using Porous Silicon Gas Sensor

Motohashi, Akira; Ruike, Masatoshi; Kawakami, Manabu; Aoyagi, Hidekazu; Kinoshita, Akira; Satou, Akinobu

doi:10.1143/jjap.35.4253

Cited by 32 publications

(11 citation statements)

References 6 publications

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“…These include metal contacts evaporated only on the porous layer surface [15] or in a "sandwich" configuration [8,9,16,17], the use of coplanar contacts on the porous layer [10] and interdigitated electrodes using pn junctions surrounded by PSi [18,19]. In all cases the response of the device depends on the characteristics of the electrical contact with the PSi.…”

Section: Introductionmentioning

confidence: 99%

Electrical porous silicon chemical sensor for detection of organic solvents

Archer

Christophersen²,

Fauchet

2005

Sensors and Actuators B: Chemical

134

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Section: Introductionmentioning

confidence: 99%

Electrical porous silicon chemical sensor for detection of organic solvents

Archer

Christophersen²,

Fauchet

2005

Sensors and Actuators B: Chemical

134

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“…It is worth mentioning that binding of molecules to semiconductor surfaces could modify the carrier concentration in the space‐charge region . For instance, when PSi layers are exposed to water vapor or alcohols, the conductivity of the porous layer dramatically increases . Both n‐hexane and toluene have a hydrophobic character with small values of dielectric constant (Table ).…”

Section: Resultsmentioning

confidence: 99%

Electrical porous silicon sensor for detection of various organic molecules in liquid phase

Harraz

Ismail

Bouzid

et al. 2015

Phys. Status Solidi A

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An electrical sensor based on porous silicon (PSi) for the detection of various organic molecules in the liquid phase is demonstrated. PSi layers with a thickness of ∼4.5 μm and pore sizes in the range of 30 nm were initially synthesized by the electrochemical anodization of a silicon wafer. Anodic oxidation of the mesoporous layers was conducted to passivate the surface and the electrical contacts were created exclusively onto the front porous film. Real‐time measurements of conductance were performed at room temperature as a sensing response parameter. The as‐fabricated sensors exhibit a sensitive and reversible response upon exposure to polar solvents including ethanol, methanol, acetone, and acetonitrile with a conductance increase. However, an irreversible response was detected upon the addition of non‐polar molecules (n‐hexane and toluene) with a conductance decrease. The response time covering both infiltration and evaporation times was in the order; acetone < methanol < acetonitrile < ethanol. The response to pure water was extremely slow, due to poor hydrophilicity of the surface. The observed response could be understood in terms of the change in surface charge during solvent infiltration, along with changes in the dielectric constant of the porous layer. The sensor could be reused efficiently for ten cyclic tests for acetone, indicating excellent repeatability of the device.

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“…The calculations of S(p) were carried out through Eq. (6) with corresponding to the model coefficient 2m for porosities less than the critical, while expressions (11) and (12) were used for the porosity range ≥ 78.5 % p .…”

Section: The Surface Area Decrease At Higher Porosities a Big Number mentioning

confidence: 99%

Structural properties of porous media

Ghulinyan

Aroutiounian

2003

phys. stat. sol. (a)

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PACS 61.43.Gt Structural properties of porous silicon are investigated theoretically. Distribution functions of pore sizes were introduced and expressions for the surface and volume porosities of the material are obtained. The suggested models allow one to calculate the specific surface area and its dependence on porosity. A model for macroporous silicon with a nanoporous layer on the pore walls is suggested also. An attempt is done to describe analytically the observed phenomenon of the specific surface area decrease at higher porosities.

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Identification of Water Molecules in Low Humidity and Possibility of Quantitative Gas Analysis using Porous Silicon Gas Sensor

Cited by 32 publications

References 6 publications

Electrical porous silicon chemical sensor for detection of organic solvents

Electrical porous silicon chemical sensor for detection of organic solvents

Electrical porous silicon sensor for detection of various organic molecules in liquid phase

Structural properties of porous media

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