Imaging ellipsometry measurement noises associated with non-uniform retardation of the compensator

Jin, Lianhua; Iizuka, Yuki; Kondoh, Eiichi; Uehara, Makoto; Gelloz, Bernard

doi:10.1007/s10043-019-00569-5

Opt Rev

2019

DOI: 10.1007/s10043-019-00569-5

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Imaging ellipsometry measurement noises associated with non-uniform retardation of the compensator

Lianhua Jin

Yuki Iizuka

Eiichi Kondoh

et al.

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Cited by 2 publications

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“…The traditional ellipsometry parameters Δ and Ψ are obtained by using the rotating compensator method. 18,19) During measurement, a stack of images is collected through the sampling every 5°rotation intervals of the compensator for the single optical circle of 180°.…”

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confidence: 99%

Lateral ellipsometry resolution for imaging ellipsometry measurement

Jin¹,

Kondoh²,

Iizuka³

et al. 2021

Jpn. J. Appl. Phys.

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As an approach to integrate both single-point measurement ellipsometry and optical microscopy, imaging ellipsometry possesses the capability of measurement of distributions of optical constants and/or thickness of sample surfaces. Considering the exact distinguishment of neighboring surfaces from imaging ellipsometry measurement, in this note, we propose to use a new criterion for the lateral ellipsometry resolution: about 2.23 fold of the Abbe diffraction limit for a microscope. This criterion will be helpful for the estimation of the applicability of an imaging ellipsometer into the evaluation of micro-patterned surfaces.

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mentioning

confidence: 99%

Lateral ellipsometry resolution for imaging ellipsometry measurement

Jin¹,

Kondoh²,

Iizuka³

et al. 2021

Jpn. J. Appl. Phys.

Self Cite

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show abstract

Effect of light source uniformity for imaging ellipsometry measurements

Zhou

Wei

Wang

et al. 2023

Optics Communications

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Imaging ellipsometry measurement noises associated with non-uniform retardation of the compensator

Cited by 2 publications

References 15 publications

Lateral ellipsometry resolution for imaging ellipsometry measurement

Lateral ellipsometry resolution for imaging ellipsometry measurement

Effect of light source uniformity for imaging ellipsometry measurements

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