1996
DOI: 10.1063/1.117179
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Imaging the local electrical properties of metal surfaces by atomic force microscopy with conducting probes

Abstract: A promising technique capable of performing localized resistance measurements over a surface is presented using a modified commercial atomic force microscope with a conducting probe. Its overall purpose is to obtain simultaneous cartographies of surface roughness and local resistance within a given microscopic area of a sample with nanometer scale resolution. Although an elaboration of suitable probes remains an ongoing problem, convincing images of some metal surfaces that reveal occasionally surprising featu… Show more

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Cited by 175 publications
(101 citation statements)
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“…The Fe layers were grown by RF sputtering at room temperature and covered by a naturally oxidized Al layer, resulting in a AlO x (1.5 nm)/Al(1.5 nm) cap. The tunnel junctions were defined by nanoindentation lithography 46,47 with top electrodes of either Au/CoO/Co or Au/CoO/Co/Fe (see also ref. 26 for details on the role of CoO).…”
Section: Methodsmentioning
confidence: 99%
“…The Fe layers were grown by RF sputtering at room temperature and covered by a naturally oxidized Al layer, resulting in a AlO x (1.5 nm)/Al(1.5 nm) cap. The tunnel junctions were defined by nanoindentation lithography 46,47 with top electrodes of either Au/CoO/Co or Au/CoO/Co/Fe (see also ref. 26 for details on the role of CoO).…”
Section: Methodsmentioning
confidence: 99%
“…The CT-AFM is based on a Digital Instruments Nanoscope III multimode AFM, which was modified by Houzé et al to perform local resistance measurements in the range of 100 to 10 12 ohms with 5% accuracy under a bias voltage ranging from 0.1 to 10 V [26]. The LAO/STO cross-sectional samples for measurements of the local resistance with CT-AFM were cut through the contacts described above and glued together front-to-front (as for a TEM cross section) so that the contacts remained usable.…”
Section: Sample Preparation For Ct-afm Charaterization Of Lao/sto Strmentioning
confidence: 99%
“…19 Resistance mappings of 20 μm × 20 μm regions were collected, by applying a bias voltage of 1 V, at room temperature with a 10 −12 -10 −4 A current range and Si 3 N 4 tips coated with B-doped diamond.…”
Section: Introductionmentioning
confidence: 99%