2022
DOI: 10.3390/app122311979
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Imaging the Permittivity of Thin Film Materials by Using Scanning Capacitance Microscopy

Abstract: Recently, great advances had been made by using scanning probe microscopy (SPM) to quantify the relative permittivity of thin film materials on a nanometer scale. The imaging techniques of permittivity for thin film materials with SPM, especially for photoelectric materials, have not been fully researched until now. Here, we presented a method to image permittivity of thin film materials by using a scanning capacitance microscope (SCM). This method combined the quantitative measurement by using SCM with the ca… Show more

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