2018
DOI: 10.3390/jimaging4070088
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Imaging with a Commercial Electron Backscatter Diffraction (EBSD) Camera in a Scanning Electron Microscope: A Review

Abstract: Abstract:Scanning electron microscopy is widespread in field of material science and research, especially because of its high surface sensitivity due to the increased interactions of electrons with the target material's atoms compared to X-ray-oriented methods. Among the available techniques in scanning electron microscopy (SEM), electron backscatter diffraction (EBSD) is used to gather information regarding the crystallinity and the chemistry of crystalline and amorphous regions of a specimen. When post-proce… Show more

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Cited by 33 publications
(14 citation statements)
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“…As backscattered electrons mainly originate from the near-surface region (<100 nm), EBSD is predominantly a surface sensitive technique. [39,59] The application of this technique to metal halide perovskites is, however, severely hindered by the sensitivity of these materials to beam-induced damage and is still in its infancy. [39,37] Efforts to circumvent these problems have been made by using highly sensitive cameras and low vacuum SEMs to minimize beam exposure and charge build-up in the perovskite.…”
Section: Resultsmentioning
confidence: 99%
See 2 more Smart Citations
“…As backscattered electrons mainly originate from the near-surface region (<100 nm), EBSD is predominantly a surface sensitive technique. [39,59] The application of this technique to metal halide perovskites is, however, severely hindered by the sensitivity of these materials to beam-induced damage and is still in its infancy. [39,37] Efforts to circumvent these problems have been made by using highly sensitive cameras and low vacuum SEMs to minimize beam exposure and charge build-up in the perovskite.…”
Section: Resultsmentioning
confidence: 99%
“…The spatial resolution in EBSD is mainly determined by the size of the interaction volume of the primary electron beam and thus depends on the material and beam conditions used, and is typically in the range of 20–150 nm. [ 59 ] . As backscattered electrons mainly originate from the near‐surface region (<100 nm), EBSD is predominantly a surface sensitive technique.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Brodusch and his coauthors apply EBSD-DF to study minerals as well as magnetic domains in electrical steel, both in reflection. When EBSD-DF is applied in transmission (AA2099 Al-Li-Cu alloy), the visual effects which arising from this contrast mode are even more pronounced, revealing additional information about precipitates and deformation in the alloy's grain structure [13].…”
Section: Data Methods and Resultsmentioning
confidence: 99%
“…It is equipped with an 80mm 2X-Max SDD EDS detector with the EBSD Aztec HKL Advanced system. The high probe of this microscope with 1μA current allows the automatic EDS-EBSD mapping to create a montage of all the regions of a given specimen automatically at very high speed [9]. The BSE detector can produce quantitative three-dimensional maps of the surface of a specimen to quantify complicated and rough surfaces.…”
Section: Core Samples' Preparation Processmentioning
confidence: 99%