Immersion lithography at 157 nm

Switkes, M.; Rothschild, M.

doi:10.1116/1.1412895

Cited by 111 publications

(55 citation statements)

References 8 publications

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“…On partially wetting polycarbonate surfaces, we observed rupture and dewetting of the liquid films, a relevant phenomenon for coating technology [14] and immersion lithography [15][16][17]. We determined the density of dry spots as well as the density and size distribution of residual droplets as a function of the minimum film thickness.…”

Section: Discussionmentioning

confidence: 99%

“…Consequently air-jets are employed to initiate the redistribution of liquid in continuous coating of chemically patterned surfaces [14]. In immersion lithography [15][16][17], a photoresist covered silicon wafer is exposed through a layer of water in order to increase the effective numerical aperture of the illumination system. Controlled air-flows are utilized to contain the water meniscus between the objective lens and a partially wetting wafer, which is moving at a relative speed of approximately 1 m/s.…”

Section: Introductionmentioning

confidence: 99%

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Deformation and dewetting of thin liquid films induced by moving gas jets

Berendsen

Zeegers

Darhuber

2013

Journal of Colloid and Interface Science

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Deformation and dewetting of thin liquid films induced by moving gas jets

Berendsen

Zeegers

Darhuber

2013

Journal of Colloid and Interface Science

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“…45,46 The overall throughput benefits from a high velocity of the wafer relative to the projection optics. However, above a critical velocity liquid is entrained on the surface, which negatively affects the lithography process.…”

Section: A Application Perspectivesmentioning

confidence: 99%

Enhancement of contact line mobility by means of infrared laser illumination. I. Experiments

Tempel

Wedershoven

Zeegers

et al. 2016

Journal of Applied Physics

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Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers) Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. The shape of a droplet moving on a solid substrate is largely determined by the mobility of its contact line. Above a certain critical velocity, the droplet typically disintegrates and leaves residual liquid behind. We studied experimentally how localized infrared laser illumination can stabilize it against the progressive loss of liquid. We systematically varied the substrate velocity, the laser power, and the laser spot position and found that the critical velocity of the droplet can be substantially increased. These results are potentially important for increasing throughput in immersion lithography systems. V C 2016 AIP Publishing LLC.

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“…[37][38][39][40][41][42][43][44] Our study is motivated by immersion lithography, where the occurrence of such residual liquid is undesirable. 45,46 In this manuscript, we study the increase of mobility of a stationary contact line on a moving, partially wetting substrate by means of localized infrared (IR) laser irradiation. In Paper I, 69 we presented corresponding experimental results.…”

Section: Numerical Simulations I Introductionmentioning

confidence: 99%

Enhancement of contact line mobility by means of infrared laser illumination. II. Numerical simulations

Wedershoven

Tempel

Zeegers

et al. 2016

Journal of Applied Physics

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A droplet that moves on a solid substrate with a velocity higher than a certain critical velocity disintegrates, i.e., leaves behind residual droplets. Infrared laser illumination can be used to increase the droplet mobility and suppress the shedding of droplets. By means of two-dimensional numerical simulations, we studied the effect of a non-uniform temperature distribution on the dynamics of straight receding contact lines. A streamfunction-vorticity model is used to describe the liquid flow in the vicinity of the receding contact line. The model takes into account the thermocapillary shear stress and the temperature-dependent liquid viscosity and density. A second, coupled model describes the laser-induced displacement of the contact line. Our results show that the reduction of the liquid viscosity with increasing temperature is the dominant mechanism for the increase of the critical velocity. Thermocapillary shear stresses are important primarily for low substrate speeds. V C 2016 AIP Publishing LLC. [http://dx

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Immersion lithography at 157 nm

Abstract: A primary standard for 157 nm excimer laser measurements AIP Conf.

Cited by 111 publications

References 8 publications

Deformation and dewetting of thin liquid films induced by moving gas jets

Deformation and dewetting of thin liquid films induced by moving gas jets

Enhancement of contact line mobility by means of infrared laser illumination. I. Experiments

Enhancement of contact line mobility by means of infrared laser illumination. II. Numerical simulations

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