The biocompatibility of undoped and n‐type silicon nanowires (SiNWs), synthesized by metal‐catalyzed chemical vapor deposition, was investigated in vitro, and compared with that for SiO2‐coated silicon wafers. In cell interaction studies, L929 mouse fibroblast cells were used, in which MTT assay, AO/PI dye staining, cell proliferation/growth, and changes in cell adhesion/morphology on the surfaces were applied and investigated. Heamocompatibility of these materials were also tested. No significant cytotoxic effects were observed for either the undoped or for the n‐type phosphorus‐doped SiNWs. The cells on the nanowires exhibit high viability, normal nuclear, and morphological structure. They have shown no considerable negative blood response with respect to the control.