Cerium oxide, also known as CeO2, can be synthesized by the hydrothermal process with cerium nitrate precursor solution. After drying and sintering at 800,900, and 1100 C, different-sized cerium oxide nanoparticles were produced from the solution. Using x-ray diffractometers, the researchers were able to determine that all of the cerium oxide nanoparticles have a unique structure called fluorite crystalline structures. The structural, morphological and optical properties of films were investigated by a set of characterization techniques such as X-ray diffraction (XRD) and scanning electron microscopy (SEM). The estimation of crystallite size is (22.12,27.34 and 42.02 nm), which is confirmed by Scherrer formulae from XRD pattern. The dielectric constant increased with the increase of crystallite size due to the size effect. The crystal size increased with increased sintering temperature. Keywords: Cerium oxide (CeO2), structural, crystal size, , morphology,Dielectric constant.