Impact of composition and ex-situ laser irradiation on the structure and optical properties of As-S-based films synthesized by PECVD

Preparation of quaternary solution processed chalcogenide thin films using mixtures of separate As40S60 and Ge20Sb5S75 glass solutions

“…planar waveguides, high resolution photo-and/or ebeam resists, phase change memories media [6][7][8]). Chalcogenide thin films can be deposited from their solution in organic bases, using techniques such as spin-coating, spiral bar-coating, electrospray, inkjet printing [9][10][11][12], or from gaseous phase by thermal vapour deposition, sputtering, laser ablation or chemical vapour deposition [13,14,15]. Solution deposition route exploits solubility of chalcogenide glasses in alkaline solvents, mainly in aliphatic amines.…”