Impact of kinetic inductance effect on high‐T_c

Abstract

High‐Q transmission high‐Tc superconducting coplanar waveguide resonators have been employed to make accurate measurements of the temperature dependence of the penetration depth via the change in phase velocity. Resonators made from several different film thicknesses are well described using a zero temperature penetration depth and a T‐squared temperature dependence using a full‐wave spectral‐domain model of the coplanar waveguide transmission line. © 1993 John Wiley & Sons, Inc.

Planar microwave devices fabricated by ion-implantation patterning of high-temperature superconductors

“…Si ions were implanted into the films at an energy of 80 keV with two different doses: 1ϫ10 16 /cm 2 and 3ϫ10 16 / cm 2 . Since Kain and others 8 showed the microwave loss and phase velocity in HTS CPW structures similar to ours to be only weakly dependent on film thickness over the thickness range 100-300 nm, the thinner films ͑100-120 nm͒ were used here to reduce the implantation time and potential dam-a͒ Electronic mail: degroot@boulder.nist.gov age to the photoresist mask. After implantation, the photoresist was removed by oxygen plasma ashing, followed by Ti/Au metal deposition for the electrical contacts.…”

Inductance measurements in thin films

“…Employing the values of the sample geometry and the measured values of L, we have determined the value of the magnetic penetration depth. For the straight delay line λ = 241 nm at 18 K and for the meander delay line λ = 281 nm at 30 K. The magnitude of the inferred magnetic penetration depth is in good agreement with various measurements such as surface impedance, d.c. magnetization, muon spin relaxation and resonant frequency measurements using a network analyser and LC resonant circuits [10,[15][16][17][18][19].…”