2012
DOI: 10.1149/2.027204jes
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Impact of Oxidation on Ge2Sb2Te5and GeTe Phase-Change Properties

Abstract: Effects of Ge 2 Sb 2 Te 5 and GeTe oxidation on their phase-change properties were studied by optical measurements and Parallel Angle Resolved X-ray Photoelectron Spectroscopy (PARXPS). The influence of oxygen on the active material was depicted in order to explain variations of the phase-change properties. The surface analysis evidenced a two-steps oxidation involving the formation of germanium and antimony oxides then tellurium oxide. A smooth surface sputtering allowed physically distinguishing the differen… Show more

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Cited by 60 publications
(44 citation statements)
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“…1(a,b). The T xt and T xt of the pure GeTe film is 194 ± 1 °C and 195 ±1 °C, respectively, as shown by the dash lines in the figures, which agrees well with values reported elsewhere2528. Oxygen doping substantially increases the T x of GeTe.…”
Section: Resultssupporting
confidence: 90%
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“…1(a,b). The T xt and T xt of the pure GeTe film is 194 ± 1 °C and 195 ±1 °C, respectively, as shown by the dash lines in the figures, which agrees well with values reported elsewhere2528. Oxygen doping substantially increases the T x of GeTe.…”
Section: Resultssupporting
confidence: 90%
“…The crystallisation activation energy of GeTe was found to be 2.26 eV inside the film and 2.31 eV at the film’s surface, which are in the range of values reported in literature (i.e. 2.0 to 2.72 eV)242528. We suspect the reason for the higher activation energy is due to stress in the films.…”
Section: Resultssupporting
confidence: 62%
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“…Besides these obvious direct applications, there are also some indirect cases where germanium dioxide is either a beneficial or an unwanted compound. A solid mixture of m GeO 2 × n TeO 2 has been proposed as the final oxidation product of GeTe surfaces, and may well be relevant for other phase‐change data‐storage devices which must be protected from oxidation . Germanium nanowires with an amorphous GeO 2 layer on the outside have been experimentally characterized by Zhang et al, and in fact, oxide species were found to promote growth of silicon and germanium nanostructures .…”
Section: Introductionmentioning
confidence: 99%
“…A solid mixture of m GeO 2 3 n TeO 2 has been proposed as the final oxidation product of GeTe surfaces, [8] and may well be relevant for other phasechange data-storage devices which must be protected from oxidation. [9] Germanium nanowires with an amorphous GeO 2 layer on the outside have been experimentally characterized by Zhang et al, [10] and in fact, oxide species were found to promote growth of silicon and germanium nanostructures. [11] Chemical reactions at the surface of germanium nanowires, including oxidation mechanisms, were discussed in detail by Hanrath and Korgel.…”
Section: Introductionmentioning
confidence: 99%