Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

Nogami, Hirofumi; Kobayashi, Takeshi; Okada, Hironao; Masuda, Takashi; Maeda, Ryutaro; Itoh, Toshihiro

doi:10.7567/jjap.51.09ld11

Cited by 10 publications

(4 citation statements)

References 20 publications

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“…However, a porous ceramic can be poled via a pulse poling technique since the traditional approach of poling these materials generally produces a low increase in piezoelectric properties of porous ceramic pellets [29]. Generally, conventional dc poling is applied to piezoelectric materials, which takes several hours for their dipole orientation [30], [31], and such a procedure of dipole alignment is not efficient in the case of porous ceramics as the applied electric field concentrates in low permittivity porous phase [32]. In addition, aligning the dipoles via conventional poling can affect productivity in terms of mass production.…”

Section: Introductionmentioning

confidence: 99%

Effect of poling and porosity on BaTiO3 for piezocatalytic dye degradation

Gaur,

Porwal,

Sharma

et al. 2023

J Mater Sci: Mater Electron

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The presence of both organic and inorganic pollutants in water can represent a threat to our ecosystems and pose a challenge to long-term sustainability. As a result, there is a need to investigate novel methods for addressing environmental remediation. Among a variety of techniques available, piezoelectric catalysis has attracted attention due to its abililty to harness the piezoelectric effect for efficient degradation of pollutants. Herein, porous ceramic barium titnate (BaTiO3) pellets for piezocatalytic dye degradation were synthesized using polymethyl methacrylate (PMMA) as a pore former in 0-30 wt.% proportion through solid state reaction method. The synthesized porous BaTiO3 pellets were characterized in detail by X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy and field emission scanning electron microscopy. An increase in the degradation of a Methylene Blue (MB) dye with an increase in porosity within the BaTiO3 materials, where a maximum degradation was observed for 30 wt.% PMMA pellet which has a degradation rate that was ~1.75 greater than the dense (0 wt.% PMMA) BaTiO3 ceramic pellet. Furthermore, the synthesized porous BaTiO3 ceramic pellets were pulse poled, where the piezoelectric coefficient (d33) decreased with an increase in porosity. The poled 30 wt.% PMMA porous BaTiO3 pellet showed approximately ~57% MB dye degradation in 180 minutes, which was comparable with 30 wt.% PMMA unpoled BaTiO3 and dense 0 wt.% PMMA poled BaTiO3 ceramic pellet. The study provides insights on the influence of poling of a low density porous ceramic pellets, which are utilised as the piezocatalyst for water remediation.

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Section: Introductionmentioning

confidence: 99%

Effect of poling and porosity on BaTiO3 for piezocatalytic dye degradation

Gaur,

Porwal,

Sharma

et al. 2023

J Mater Sci: Mater Electron

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“…To build this system, several low-power technologies were developed, including a custom-built large-scale integrator for an event-driven system, a bimetal micro electromechanical system (MEMS) temperature switch, a miniaturized 300 MHz band loop antenna and piezoelectronic switches for activity sensors. [11][12][13][14][15] For cowhouses, other studies have developed wearable wireless sensors for the detection of estrus, 16,17) orally administrable wireless activity or pH sensors for monitoring rumen conditions, [18][19][20] portable sensors for the detection of estrus intensity, 21) implantable wireless thermometers 22) and wearable temperature sensors for cows. 23,24) To fabricate these sensors, new fabrication processes, such as roomtemperature sealing 25,26) and flexible structures for high flexibility and stretchability, 27,28) have been developed.…”

Section: Introductionmentioning

confidence: 99%

A non-invasive heart rate measurement system using laser Doppler blood flowmetry with husbandry training of the masked palm civet (Parguma larvata)

Nogami¹,

Satoru²,

Saito³

et al. 2021

Jpn. J. Appl. Phys.

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Husbandry training (HT) is done to facilitate healthcare, treatment or animal research with zoo animals. At the Omuta City Zoo, HT of masked palm civets (Parguma larvata) is used to aid the taking of blood samples. With HT the burden on the animal can be remarkably reduced without the use of anesthesia. However, it is necessary to devise a blood sampling method using HT that reduces stress on the animals as much as possible. To devise such a stress-reducing method, quantitative assessments related to stress are needed. As heart rate increases with stress, we attempted to devise a non-invasive method for measuring heart rate. The attachment of sensors not only stresses the animal but also requires much effort from keepers. Therefore, a laser Doppler blood flowmeter (LDF) was embedded in the HT board, and an LDF and an algorithm to eliminate body motion artifacts were used in measurement attempts. As a result, a clear pulse wave was detected in some sections, and heart rate was calculated from the pulse wave.

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“…A thin film PZT is widely utilized in piezoelectric MEMS devices such as gyros [4], inkjet heads [5], RF-MEMS switches [6], and ultrasonic transducers [7]. We have reported various kinds of piezoelectric devices including microscanners [8,9], self-sensitive microcantilevers [10,11], electrostatic field sensors [12,13], accelerometers [14,15], trigger switches for wireless sensor nodes [16,17], pyroelectric sensors [18], and energy harvesters [19,20]. Moreover, we have utilized MEMS-based piezoelectric microcantilevers to investigate the crystal structure [21,22] and fatigue behavior [23] of PZT thin films.…”

Section: Introductionmentioning

confidence: 99%

Ultra-Thin Piezoelectric Strain Sensor Array Integrated on a Flexible Printed Circuit Involving Transfer Printing Methods

et al. 2016

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In this paper, we present a novel sensor array manufacturing process that involves transfer printing methods using a chip mounter with a vacuum collet. Using these methods, one can mount not only ultra-thin microsensors but also microcontroller and amplifier chips required for sensor device fabrication. We successfully transfer-printed a very fragile MEMS-based 5-mm-long, 1-mm-wide, 5-µm-thick high-aspect-ratio ultra-thin PZT(1.9 µm)/Si(3 µm) strain sensor onto a flexible printed-circuit (FPC) substrate with etched Cu wiring. Then, we connected the sensor to the wiring by printing a conductive paste using a screen printer. Large ferroelectric polarization-voltage hysteresis curves were obtained even after the transfer printing process. Since an output voltage corresponding to the magnitude of the strain from the developed sensor was generated, it was confirmed that ultra-thin sensors could be integrated to the FPC substrate by these transfer and screen printing techniques without damage. The PZT thin films have shown 0.18 mV/µε of dynamic strain sensitivity according to the resonant vibration of the stainless plate.

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Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

Cited by 10 publications

References 20 publications

Effect of poling and porosity on BaTiO3 for piezocatalytic dye degradation

Effect of poling and porosity on BaTiO3 for piezocatalytic dye degradation

A non-invasive heart rate measurement system using laser Doppler blood flowmetry with husbandry training of the masked palm civet (Parguma larvata)

Ultra-Thin Piezoelectric Strain Sensor Array Integrated on a Flexible Printed Circuit Involving Transfer Printing Methods

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