2023
DOI: 10.1149/2162-8777/acb96b
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Impact of the Self-Heating Effect on Nanosheet Field Effect Transistor Performance

Abstract: Nanosheet field effect transistor (NSFET) has emerged as a promising candidate to replace FinFET devices at sub-7 nm technology nodes and for different SoC applications. In this work, we have investigated the DC properties of 3D vertically-stacked NSFET including the impact of self-heating effect (SHE) and also the influence of geometry scaling. The thermal resistance and the maximum lattice temperature have been analyzed according to the device’s channel number. Also, the distribution of lattice temperature h… Show more

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Cited by 11 publications
(4 citation statements)
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“…It determines the gain and linearity of amplifiers, ensuring faithful signal reproduction and efficient power transfer in communication systems. 35,36 As shown in Figs. 4a-4c the g m improves as increasing the L g and reducing the T NS and W NS , respectively due to lower leakage current and enhanced driving characteristics of the device.…”
Section: Resultsmentioning
confidence: 82%
“…It determines the gain and linearity of amplifiers, ensuring faithful signal reproduction and efficient power transfer in communication systems. 35,36 As shown in Figs. 4a-4c the g m improves as increasing the L g and reducing the T NS and W NS , respectively due to lower leakage current and enhanced driving characteristics of the device.…”
Section: Resultsmentioning
confidence: 82%
“…Gate-all-around (GAA) devices, such as stacked nanowire field-effect transistors (SNW-FET) and stacked nanosheet FETs (SNS-FET), are the promising candidates for sub-7 nm technology [1,2]. GAA devices feature improved electrostatic integrity compared to FinFETs and demonstrate superior resilience to short-channel effects (SCEs) [3,4].…”
Section: Introductionmentioning
confidence: 99%
“…As the feature size of advanced MOSFETs scales down, many new materials, new process technologies, and new transistor architectures have been introduced in very large-scale integrated circuits (VLSIs). [1][2][3][4][5][6][7] However, as the technology node scales down to 3 nm node and beyond, the fin field effective transistor (FinFET) faces several challenges such as the process fragility of ultra-steep and high fins, degradation of carrier mobility, and unavoidable shortchannel-effects (SCEs), which greatly limit its continuous application for future advanced integrated circuits (ICs). [8][9][10][11] In order to fulfill the demand for the higher effective width (W eff )/footprint ratios and better gate controllability to suppress the SCEs, vertically stacked horizontal gate-all-around (GAA) Si nanosheet field-effecttransistors (NSFETs) have been considered as one of the most promising candidates at 3 nm node and beyond.…”
mentioning
confidence: 99%