In
this work, we demonstrate a process having the capability to
realize single-digit nanometer lithography using single heavy ions.
By adopting 2.15 GeV 86Kr26+ ions as the exposure
source and hydrogen silsesquioxane (HSQ) as a negative-tone inorganic
resist, ultrahigh-aspect-ratio nanofilaments with sub-5 nm feature
size, following the trajectory of single heavy ions, were reliably
obtained. Control experiments and simulation analysis indicate that
the high-resolution capabilities of both HSQ resist and the heavy
ions contribute the sub-5 nm fabrication result. Our work on the one
hand provides a robust evidence that single heavy ions have the potential
for single-digit nanometer lithography and on the other hand proves
the capability of inorganic resists for reliable sub-5 nm patterning.
Along with the further development of heavy-ion technology, their
ultimate patterning resolution is supposed to be more accessible for
device prototyping and resist evaluation at the single-digit nanometer
scale.