Impacts of plasma fluctuation on nanoparticle growth in reactive plasmas

Shiratani, Masaharu; Kamataki, Kunihiro; Morita, Yasuhiko; Koga, Kazunori; Uchida, Giichirou; Itagaki, Naho; Seo, Hyunwoong

doi:10.1109/plasma.2012.6383747

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2019

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“…In addition, CVD plasma usually contains nanoparticles which could change the properties of films . In order to clarify the interaction fluctuations between reactive plasma and nanostructures, we have employed several methods such as an amplitude modulation (AM) method, an in-situ laser-light scattering (LLS) method and an envelope analysis [26][27][28][29][30][31][32][33][34][35][36].…”

Section: Introductionmentioning

confidence: 99%

Spatial-Structure of Fluctuation of Amount of Nanoparticles in Amplitude-Modulated VHF Discharge Reactive Plasma

Kamataki

Ohtomo

et al. 2019

Plasma and Fusion Research

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We have investigated spatial structure of fluctuation of amount of nanoparticles in amplitude modulated VHF discharge reactive plasma in order to understand interaction fluctuations between plasma and nanoparticles. The interaction fluctuation appeared in the whole discharge region. Especially, the strong interaction fluctuation existed at the edge region. The behaviors of time evolution of intensity of spatial structure of interaction fluctuation at the center and edge regions were different with each other. Nanoparticles at the edge region were smaller than ones in the main discharge region. It suggested that the interaction fluctuation is related to the growth of nanoparticles.

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