High-quality InAs epilayers were grown onto GaAs (001) substrate by molecular beam epitaxy. The optimal growth conditions were examined over a wide range of substrate temperature, substrate offcut orientation, and As 4 /In flux ratio. The surface morphology, electrical and structural properties were investigated by Nomarski optical microscopy, Hall effect measurement, and X-ray diffraction, respectively. It is worth noting that InAs layers grown on GaAs (001) substrate with 2°offcut towards h110i have better crystalline quality and electrical properties than that grown on GaAs substrate without offcut. The results indicated that the layers grown at 400°C, with a group V/III flux ratio of 8.5, yielded to the highest electrical quality, with a Hall mobility of 22,420 cm 2 /Vs at 80 K and 12,970 cm 2 /Vs at room temperature. It is found that the top part of 5 lm-thick InAs layer exhibits a high Hall mobility of 77,380 and 25,275 cm 2 /Vs, at 80 and 300 K, respectively.