“…Chemical etching of silicon using chemical solutions of HF, HNO 3 and water (Vasquez et al, 1992), NaNO 2 and HF or CrO 3 and HF (Beale et al, 1986;Zubko et al 1999) are employed for PS formation. However, the most widely used method is the electrochemical etching of silicon crystal in an electrolyte solution of HF and ethanol or methanol (Saha et al, 1998;Kanungo et al, 2006) or HF and water or HF and N, N dimethyl formamide (DMF) (Archer et al, 2005) by passing current for a fixed duration of time. Hummel et al (Hummel & Chang, 1992) utilized a new spark erosion technique for PS formation, which does not involve any aqueous solution or fluorine contaminants in air or in the other gases.…”