2015
DOI: 10.7567/jjap.54.06fh02
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Improved light extraction efficiency of GaN-based vertical LEDs using hierarchical micro/subwavelength structures

Abstract: We demonstrate the hierarchical micro-and subwavelength-structures on the surface of GaN based green vertical light-emitting diodes (VLEDs) to enhance the light extraction efficiency. Hierarchical structures (HSs), which were fabricated by simple two-step process consisting of pattern transfer of reflowed photoresist for micro structures (MSs) and self-masked dry etching method for subwavelength structures (SWSs), play an important role in enhancing the light extraction efficiency by reducing both the total in… Show more

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Cited by 7 publications
(4 citation statements)
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“…(a) (b) These observations raise the questions of which light distribution related to the scattering or diffraction of the light caused by these textured structures would more greatly benefit LED light extraction, and what phenomenon is caused by the structures of the various dimensions of the microstructure, submicron structure, and nanostructure [20][21][22]. These are the main focuses of this paper.…”
Section: Preliminary Studymentioning
confidence: 99%
“…(a) (b) These observations raise the questions of which light distribution related to the scattering or diffraction of the light caused by these textured structures would more greatly benefit LED light extraction, and what phenomenon is caused by the structures of the various dimensions of the microstructure, submicron structure, and nanostructure [20][21][22]. These are the main focuses of this paper.…”
Section: Preliminary Studymentioning
confidence: 99%
“…What phenomenon is caused by the structures of the various dimensions of the microstructure, submicron structure, or nanostructure? [20][21][22] These are the main focuses of this paper. We hope to clarify and present solutions these questions with the establishment of the hybrid simulation approach.…”
Section: Preliminary Studymentioning
confidence: 99%
“…However, only a few studies have reported on the integration of moth eye nanostructures across the entire surface of artificial cornea (i.e., microlens arrays). Previous studies on the hierarchical microand nanostructures mainly focused on the optical characteristics of each structure and important details related to the geometry of nanostructures were not optimized [9,10].…”
Section: Introductionmentioning
confidence: 99%