2009
DOI: 10.1063/1.3254236
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Improved model for the angular dependence of excimer laser ablation rates in polymer materials

Abstract: Measurements of the angle-dependent ablation rates of polymers that have applications in microdevice fabrication are reported. A simple model based on Beer's law, including plume absorption, is shown to give good agreement with the experimental findings for polycarbonate and SU8, ablated using the 193 and 248 nm excimer lasers, respectively. The modeling forms a useful tool for designing masks needed to fabricate complex surface relief by ablation.

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Cited by 11 publications
(5 citation statements)
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“…The increase in the duration of the plasma plume further explains the enhancement of the impulse in figure 3. From groups (f) to (h) in figure 5, the duration of the plasma emission is gradually decreasing due to the plasma shielding effect [14][15][16]. Therefore, the impulse decreases gradually under the corresponding conditions in figure 3.…”
Section: Plasma Plumementioning
confidence: 92%
“…The increase in the duration of the plasma plume further explains the enhancement of the impulse in figure 3. From groups (f) to (h) in figure 5, the duration of the plasma emission is gradually decreasing due to the plasma shielding effect [14][15][16]. Therefore, the impulse decreases gradually under the corresponding conditions in figure 3.…”
Section: Plasma Plumementioning
confidence: 92%
“…As demonstrated by Pedder et al [25] and Jiménez et al [26], the incorporation of models taking into account the angular dependence of laser-ablation rates as well as the effect of plume absorption can be important in efforts to improve the ablation algorithms used in refractive surgery. Differences in corneal power and corneal asphericity encountered when using this model can significantly affect the visual function of patients after LASIK.…”
Section: Discussionmentioning
confidence: 99%
“…As demonstrated by Pedder et al [37], and Jiménez et al [38], the incorporation of models taking into account the angular dependence of laser-ablation rates as well as the effect of plume absorption, can be important in efforts to improve the ablation algorithms used in refractive surgery. The high accuracy of determination of stroma plume absorption coefficients and the incorporation of this information in laser-ablation equations can improve the prediction of postsurgical corneal shape.…”
Section: Discussionmentioning
confidence: 99%