Improved uniformity of atomic-layer-deposited HfO2 film along the length of glass monocapillary with high length-diameter ratio

Li, Yanli; Wu, Hongchang; Lv, Wensi; Kong, Xiangdong; Han, Li; Zhang, He

doi:10.1016/j.optmat.2024.115440

Optical Materials

2024

DOI: 10.1016/j.optmat.2024.115440

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Improved uniformity of atomic-layer-deposited HfO2 film along the length of glass monocapillary with high length-diameter ratio

Yanli Li,

Hongchang Wu,

Wensi Lv

et al.

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Performance characterization of an Al₂O₃/HfO₂ parabolic multilayer based on a laboratory X-ray source

Yuan,

Li,

Sun

et al. 2024

Appl. Opt.

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Parabolic multilayers (PMs) are widely used in synchrotron radiation, X-ray free electron lasers, laboratory X-ray sources, and so on, and therefore, how to expediently and effectively determine their performance is important for the designers, manufacturers, and users of them. This paper designed a method based on a laboratory X-ray source and polycapillary parallel X-ray lens to characterize the performances of one Al2O3/HfO2 PM. The results showed that a monochromatic X-ray beam with a width of 97.76 µm and a divergence of 0.667 mrad at Cu-K α (8.04 keV) was obtained with the PMs used in the paper based on a laboratory X-ray source with a focus size of 50–100 µm at various working powers, and its X-ray reflectivity for Cu-K α and Cu-K β was 43.71% and 38.62%, respectively.

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Performance characterization of an Al₂O₃/HfO₂ parabolic multilayer based on a laboratory X-ray source

Yuan,

Li,

Sun

et al. 2024

Appl. Opt.

View full text Add to dashboard Cite

show abstract

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Improved uniformity of atomic-layer-deposited HfO2 film along the length of glass monocapillary with high length-diameter ratio

Cited by 1 publication

References 31 publications

Performance characterization of an Al₂O₃/HfO₂ parabolic multilayer based on a laboratory X-ray source

Performance characterization of an Al₂O₃/HfO₂ parabolic multilayer based on a laboratory X-ray source

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Improved uniformity of atomic-layer-deposited HfO2 film along the length of glass monocapillary with high length-diameter ratio

Cited by 1 publication

References 31 publications

Performance characterization of an Al2O3/HfO2 parabolic multilayer based on a laboratory X-ray source

Performance characterization of an Al2O3/HfO2 parabolic multilayer based on a laboratory X-ray source

Contact Info

Product

Resources

About

Performance characterization of an Al₂O₃/HfO₂ parabolic multilayer based on a laboratory X-ray source

Performance characterization of an Al₂O₃/HfO₂ parabolic multilayer based on a laboratory X-ray source