Improvement of Alkali Durability of Silver-Based Multilayer Coatings   for Use in Flat Panel Displays

Aoshima, Yuki; Miyazaki, M.; Sato, Kazuo; Akao, Yasuhiko; Takaki, S.; Adachi, Kunihiko

doi:10.1143/jjap.40.4166

Cited by 14 publications

(7 citation statements)

References 10 publications

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“…It is well known that a very thin silver or silver-containing palladium layer between the transparent-conducting oxide layers allows for very high electrical conductivity, good mechanical durability, and high transparency in the visible range because of the anti-reflection effect. 20 We have also observed a similar effect for our TCE structure, which is described in a later section.…”

Section: Structure Of the Multilayer Flexible Plastic Substratesupporting

confidence: 83%

“…An optical transmission greater than 80% over 450-750 nm ranges has been obtained, with maximum 85% and 86% for dry-etchable and wet-etchable plastic substrates, respectively. Better optical transmission of the plastic substrate compensates for slightly higher sheet resistance in comparison with the results (2 Ω/I I and average 70% optical transmission) 20 reported for a similar multilayer TCE deposited on glass substrates.…”

Section: Tce Patterningsupporting

confidence: 77%

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Transparent flexible plastic substrates for organic light-emitting devices

Hong

Lennhoff³

et al. 2004

Journal of Elec Materi

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In this paper, we describe the properties of flexible plastic substrates with a transparent conducting electrode (TCE), which are important for organic lightemitting devices (OLEDs). Specifically, we have evaluated the TCE electrical resistivity, surface roughness, electrode patterning, optical transmission, and the substrate water vapor/oxygen transmission. We have studied the effect of ultraviolet (UV)-ozone treatment on the TCE surface by using contact angle measurements and x-ray photoelectron spectroscopy (XPS). A decrease in the advancing contact angle by 30-40°and an increase of oxygen content on the TCE surface by 10 at.% were observed after the UV-ozone treatment. These changes facilitate the polymer adhesion to the TCE surface and increase the TCE surface work function, respectively. A sheet resistance of 12-13 Ω/I I, an optical transmission greater than 80% over the visible range, and a surface roughness of 1.4-2.2-nm RMS over 50 ϫ 50 µm 2 have been obtained for the plastic substrates. These properties are adequate for OLED applications based on United States Display Consortium specifications. Finally, we have found that a combination of hydrogenated amorphous silicon-nitride and siliconoxide layers deposited on one side of the substrate at low-temperature reduces the water vapor and oxygen transmission rates (TRs) to less than 10 Ϫ5 g/cm 2 -day-atm and about 10 Ϫ7 cc/cm 2 -day-atm, respectively.

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Section: Structure Of the Multilayer Flexible Plastic Substratesupporting

confidence: 83%

Section: Tce Patterningsupporting

confidence: 77%

Transparent flexible plastic substrates for organic light-emitting devices

Hong

Lennhoff³

et al. 2004

Journal of Elec Materi

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“…It is well known that a very thin silver or silver containing palladium layer placed between transparent conducting oxide layers allows for a very high electric conductivity, a good mechanical durability, and a high transparency in the visible range due to the anti-reflection effect. 21 Our TCE coating on this plastic substrate has a sheet resistance of 12-13 Ω/ᮀ, an optical transmittance of greater than 75% and a specular reflectance of less than 3% over the visible range [ Fig. 1(b)], and a rootmean-square (RMS) surface roughness of 1.4-2.2 nm over a 50 × 50 µm 2 area.…”

Section: Plastic Substrate Propertiesmentioning

confidence: 99%

Optoelectronic properties of poly(fluorene) co‐polymer light‐emitting devices on a plastic substrate*

et al. 2005

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Abstract— The optoelectronic properties of red, green, and blue poly(fluorene) co‐polymer light‐emitting devices (PLEDs) on a plastic substrate having a multi‐layered structure with water vapor and oxygen transmission rates of less than 10−5 g/cm2‐day‐atm and 10−7 cc/cm2‐day‐atm, respectively, is reported. A semitransparent thin metal multi‐layer (i.e., Au/Ag/Au or Ag/Au/Ag) is placed between the plastic substrate and the ITO coating, achieving a low sheet resistance of 12–13 Ω/□ and an adequate optical transmission greater than 75%. A wider color gamut and a maximum emission efficiency of 0.7, 10, and 1.7 cd/A for red, green, and blue PLEDs, respectively, was obtained. Finally, a simple equivalent‐circuit model was used to simulate the current‐density—voltage characteristics of PLEDs.

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“…2 The multilayer sputter coatings with the silver layer are very sensitive to the surrounding atmosphere. [3][4][5] For example, when the coatings are exposed to the atmosphere, we found discolored spots on the multilayer sputter coatings, possibly caused by the migration of silver atoms in the silver layers.…”

Section: Introductionmentioning

confidence: 99%

Improvement of corrosion resistance of transparent conductive multilayer coating consisting of silver layers and transparent metal oxide layers

Koike

Yamazaki

Okamura

et al. 2007

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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In situ fabrication of blue ceramic coatings on wrought Al Alloy 2024 by plasma electrolytic oxidation J. Vac. Sci. Technol. A 30, 021302 (2012) Influence of substrate temperature and bias voltage on properties of chromium nitride thin films deposited by cylindrical cathodic arc deposition J. Vac. Sci. Technol. A 29, 051515 (2011) Ultrathin TiSiN overcoat protection layer for magnetic media J. Vac. Sci. Technol. A 29, 051502 (2011) High-corrosion-resistant Al2O3 passivation-film formation by selective oxidation on austenitic stainless steel containing Al J. Vac. Sci. Technol. A 29, 021002 (2011) Low-energy ion bombardment to tailor the interfacial and mechanical properties of polycrystalline 3C-silicon carbide J.An optical filter for plasma display panel ͑PDP͒ requires an electromagnetic shield with very high ability. The authors investigated a transparent conductive multilayer coating consisting of silver ͑Ag͒ layers and transparent metal oxide layers. The durability of the multilayer sputter coating, including the silver layer, is very sensitive to the surrounding atmosphere. For example, after an exposure test they found discolored points on the multilayer sputter coatings, possibly caused by migration of silver atoms in the silver layers. In their investigation, they modified the top surface of the multilayer sputter coatings with transition metals to improve the corrosion resistance of the multilayer coating. Specifically, they deposited transition metals 0.5-2 nm thick on the top surface of the multilayer coatings by sputtering. They chose indium tin oxide ͑ITO͒ as the transparent metal oxide. They applied the multilayer sputter coatings of seven layers to a polyethylene terephthalate ͑PET͒ film substrate. A cross-sectional structure of the film with the multilayer coatings is PET film/ITO/Ag/ITO/Ag/ITO/Ag/ITO. They evaluated the corrosion resistance of the films by a salt-water immersion test. In the test, they immersed the film with multilayer coatings into salt water, and then evaluated the appearance, transmittance, and electrical resistance of the multilayer coatings. They investigated several transition metals as the modifying material, and found that titanium and tantalum drastically improved the resistance of the multilayer coatings to the salt-water exposure without a significant decline in transmittance. They also investigated the relation between elapsed time after deposition of the modifying materials and resistance to the salt water. Furthermore, they investigated the effects of a heat treatment and an oxide plasma treatment on resistance to the salt water.

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Improvement of Alkali Durability of Silver-Based Multilayer Coatings for Use in Flat Panel Displays

Cited by 14 publications

References 10 publications

Transparent flexible plastic substrates for organic light-emitting devices

Transparent flexible plastic substrates for organic light-emitting devices

Optoelectronic properties of poly(fluorene) co‐polymer light‐emitting devices on a plastic substrate*

Improvement of corrosion resistance of transparent conductive multilayer coating consisting of silver layers and transparent metal oxide layers

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