Improvement of leakage and fatigue properties of Hf0.5Zr0.5O2 thin film by embedding ultra-thin Al2O3 interlayer

Wang, Dao; Lu, Zihao; Wang, Jianing; Sun, Yabing; Zhang, Yan; He, Danfeng

doi:10.1007/s10853-024-10527-5

J Mater Sci

2024

DOI: 10.1007/s10853-024-10527-5

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Improvement of leakage and fatigue properties of Hf0.5Zr0.5O2 thin film by embedding ultra-thin Al2O3 interlayer

Dao Wang,

Zihao Lu,

Jianing Wang

et al.

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Improvement of leakage and fatigue properties of Hf0.5Zr0.5O2 thin film by embedding ultra-thin Al2O3 interlayer

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References 55 publications

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