Improvement of measurement sensitivity near contact in intensity-interferometry flying height testers

Phetdee, Korakoch; Pimpin, Alongkorn; Srituravanich, Werayut

doi:10.1007/s00542-014-2146-3

Microsyst Technol

2014

DOI: 10.1007/s00542-014-2146-3

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Improvement of measurement sensitivity near contact in intensity-interferometry flying height testers

Korakoch Phetdee

Alongkorn Pimpin

Werayut Srituravanich

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Improvement of measurement sensitivity near contact in intensity-interferometry flying height testers

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References 14 publications

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