Improvement of Oxidation Property of SUS304 by Gas Barrier Coating

Abstract

Stainless steel is widely used as a corrosion-resistant material. However, stainless steel corrodes at high temperature (573 K ~) due to the oxidization and grain boundary corrosion. To delay the oxidation at high temperature, coating of gas barrier film will be useful method. The purpose of this study is to improve the corrosion-resistant of SUS304 at high temperature by coating transparent SiOxNy film which has gas barrier properties. In addition, the influence of inlet gas mass flow rate ratio (N2/Ar+N2) on the oxidation properties at 773 K was examined. The SiOxNy films were deposited onto polished SUS304 by unbalanced dc magnetron sputtering apparatus. To examine the oxygen transmission rate (OTR) of SiOxNy films, PET was also used as substrate. The results showed that good OTR was obtained for N2/Ar+N2 < 0.12 on PET substrate. The similar tendency was obtained for SUS304 deposited film heated up to 773 K.

Influence of film structure on gas barrier properties of SiOxNy films

“…Measurement of film thickness and surface observations were performed using a stainless steel substrate because it was difficult for the PET substrate to be fixed accurately and flat on a stage for high magnification observations. However, we compared the OTR of the SiO x N y /PET sample and the oxidation behavior of the SiO x N y /stainless steel sample in our previous work and confirmed that they showed good agreement [24]. A Fourier-transform infrared spectroscope (Nicolet 380, Thermo ELECTRON Corp., Japan) was used to analyze the chemical bonds of the SiO x N y films.…”