2015
DOI: 10.1109/tmech.2014.2351415
|View full text |Cite
|
Sign up to set email alerts
|

Improvement of Silicon Nanotweezers Sensitivity for Mechanical Characterization of Biomolecules Using Closed-Loop Control

Abstract: In this paper, we show that closed-loop control can be 6 advantageously used for the characterization of mechanical prop-7 erties of biomolecules using silicon nanotweezers (SNT). SNT have 8 already been used in open-loop mode for the characterization of 9 mechanical properties of DNA molecules. Up to now, such an ap-10 proach allows the detection of stiffness variations equivalent to 11 about 15 DNA molecules. Here, it is shown that this resolution 12 is inversely proportional to the resonance frequency of th… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
8
0

Year Published

2015
2015
2018
2018

Publication Types

Select...
5
1

Relationship

5
1

Authors

Journals

citations
Cited by 8 publications
(8 citation statements)
references
References 29 publications
0
8
0
Order By: Relevance
“…Electronics equipment, i.e., a function generator (Agilent 33220A) and an amplifier (NF, BA4825), was required to actuate tweezers. For sensing capabilities an additional lock‐in‐amplifier (Signal Recovery, AMETEK 7270 DSP) and i‐v amplifiers (Signal Recovery, model 5182) were needed …”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Electronics equipment, i.e., a function generator (Agilent 33220A) and an amplifier (NF, BA4825), was required to actuate tweezers. For sensing capabilities an additional lock‐in‐amplifier (Signal Recovery, AMETEK 7270 DSP) and i‐v amplifiers (Signal Recovery, model 5182) were needed …”
Section: Methodsmentioning
confidence: 99%
“…Tweezers were fabricated using a 〈100〉 oriented silicon‐on‐insulator wafer and fundamental micromachining techniques as detailed elsewhere . The arms and the movable structures of the actuating and sensing elements were fabricated using double side deep reactive‐ion etching and vapor hydrofluoric acid releasing.…”
Section: Methodsmentioning
confidence: 99%
“…The sharp tips engineering included a local oxidation of silicon (LOCOS) and wet anisotropic etching for revealing <111> crystallographic planes. The spring structures and inertia center of the tweezers were carefully designed to obtain a parallel motion both of the movable tip and capacitive sensing structures providing accurate sensing31. Protruding tips with an angle of 130° allowed tweezers to operate inside the microfluidic device with minimum immersion.…”
Section: Methodsmentioning
confidence: 99%
“…The sensing side consists of three elements [ 26 , 28 ]: (i) comb-drive actuators providing the necessary vibrating motion of the sensing tip, (ii) differential parallel plate capacitors for displacement sensing, and (iii) a sensing tip to access the handling area ( Figure 1 a and Figure 4 ). These elements are mechanically connected while kept isolated electrically to provide optimal simultaneous mechanical and electrical sensing.…”
Section: Concept and Designmentioning
confidence: 99%