Improvement of sub-20nm pattern quality with dose modulation technique for NIL template production

Yagawa, Keisuke; Ugajin, Kunihiro; Suenaga, Machiko; Kanamitsu, Shingo; Motokawa, Takeharu; Hagihara, Kazuki; Arisawa, Yukiyasu; Kobayashi, Sachiko; Saito, Masato; Ito, Masamitsu

doi:10.1117/12.2218809

SPIE Proceedings

2016

DOI: 10.1117/12.2218809

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Improvement of sub-20nm pattern quality with dose modulation technique for NIL template production

Keisuke Yagawa

Kunihiro Ugajin

Machiko Suenaga

et al.

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Improvement of sub-20nm pattern quality with dose modulation technique for NIL template production

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