2021
DOI: 10.1186/s41476-020-00143-6
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Improvement of the optical properties after surface error correction of aluminium mirror surfaces

Abstract: Ion beam finishing techniques of aluminium mirrors have a high potential to meet the increasing demands on applications of high-performance mirror devices for visible and ultraviolet spectral range. Reactively driven ion beam machining using oxygen and nitrogen gases enables the direct figure error correction up to 1 μm machining depth while preserving the initial roughness. However, the periodic turning mark structures, which result from preliminary device shaping by single-point diamond turning, often limit … Show more

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Cited by 5 publications
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