Improvement of transparent conductive indium tin oxide based multilayer films on p-silicon through the inclusion of thin copper-aluminium metals interlayer

Isiyaku, Aliyu Kabiru; Ali, Ahmad Hadi; Abdu, S.G.; Tahan, Muliana; Raship, Nur Amaliyana; Bakri, Anis Suhaili; Nayan, Nafarizal

doi:10.1016/j.tsf.2021.138959

Cited by 7 publications

(3 citation statements)

References 29 publications

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“…The sensors can also detect humidity [29,30]. For these applications, the films were optimized by controlling various parameters such as the annealing temperature [31][32][33][34], substrate type [35][36][37][38], deposition method [39][40][41][42][43], and doping [44][45][46][47][48]. Regarding the deposition method, the ITO thin films were most frequently prepared using physical methods.…”

Section: Introductionmentioning

confidence: 99%

Multifunctional Zn-Doped ITO Sol–Gel Films Deposited on Different Substrates: Application as CO2-Sensing Material

et al. 2022

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Undoped and Zn-doped ITO (ITO:Zn) multifunctional thin films were successfully synthesized using the sol–gel and dipping method on three different types of substrates (glass, SiO2/glass, and Si). The effect of Zn doping on the optoelectronic, microstructural, and gas-sensing properties of the films was investigated using X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM), spectroscopic ellipsometry (SE), Raman spectroscopy, Hall effect measurements (HE), and gas testing. The results showed that the optical constants, the transmission, and the carrier numbers were correlated with the substrate type and with the microstructure and the thickness of the films. The Raman study showed the formation of ITO films and the incorporation of Zn in the doped film (ITO:Zn), which was confirmed by EDX analysis. The potential use of the multifunctional sol–gel ITO and ITO:Zn thin films was proven for TCO applications or gas-sensing experiments toward CO2. The Nyquist plots and equivalent circuit for fitting the experimental data were provided. The best electrical response of the sensor in CO2 atmosphere was found at 150 °C, with activation energy of around 0.31 eV.

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Section: Introductionmentioning

confidence: 99%

Multifunctional Zn-Doped ITO Sol–Gel Films Deposited on Different Substrates: Application as CO2-Sensing Material

et al. 2022

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“…The development of ITO thin films is of a great interest in the scientific community as a result of their interesting properties, which make them possible candidates for different applications, such as optoelectronic devices [ 1 , 2 , 3 ], transparent conductive oxides [ 4 ], solar cells [ 5 , 6 , 7 ], gas sensors [ 8 , 9 ], biosensors [ 10 , 11 , 12 ], thermoelectric applications [ 13 , 14 ], and so on. ITO thin films can be prepared by various physical (magnetron sputtering [ 15 , 16 , 17 , 18 , 19 ], pulsed lased deposition [ 20 ], ion beam sputtering [ 21 ], and electron beam evaporation [ 22 ]) and chemical methods (sol–gel method [ 23 , 24 ], spray pyrolysis [ 25 ], and low-temperature combustion synthesis method [ 26 ]).…”

Section: Introductionmentioning

confidence: 99%

“…Furthermore, ITO-coated glass substrates were used in liquid crystals display (LCD) [ 44 , 45 , 46 , 47 ] and polymer dispersed liquid crystals device fabrication [ 48 , 49 , 50 ]. The suitable material for a certain application can be achieved by changing several parameters involved in the preparation process as follows: the deposition technique [ 16 ], the metal doping level [ 51 ], the pre- and final annealing temperatures [ 19 ], and the film thickness [ 22 ].…”

Section: Introductionmentioning

confidence: 99%

Structural, Optical, and Sensing Properties of Nb-Doped ITO Thin Films Deposited by the Sol–Gel Method

Nicolescu

Mitrea

Hornoiu

et al. 2022

Gels

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The aim of the present study was the development of Nb-doped ITO thin films for carbon monoxide (CO) sensing applications. The detection of CO is imperious because of its high toxicity, with long-term exposure having a negative impact on human health. Using a feasible sol–gel method, the doped ITO thin films were prepared at room temperature and deposited onto various substrates (Si, SiO2/glass, and glass). The structural, morphological, and optical characterization was performed by the following techniques: X-ray diffractometry (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM), and UV/Vis/NIR spectroscopic ellipsometry (SE). The analysis revealed a crystalline structure and a low surface roughness of the doped ITO-based thin films. XTEM analysis (cross-sectional transmission electron microscopy) showed that the film has crystallites of the order of 5–10 nm and relatively large pores (around 3–5 nm in diameter). A transmittance value of 80% in the visible region and an optical band-gap energy of around 3.7 eV were found for dip-coated ITO/Nb films on SiO2/glass and glass supports. The EDX measurements proved the presence of Nb in the ITO film in a molar ratio of 3.7%, close to the intended one (4%). Gas testing measurements were carried out on the ITO undoped and doped thin films deposited on glass substrate. The presence of Nb in the ITO matrix increases the electrical signal and the sensitivity to CO detection, leading to the highest response for 2000 ppm CO concentration at working temperature of 300 °C.

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Tracking on crystallization process of doped metal oxide IATO to optimize solvothermal conditions

Baxendale

et al. 2022

Appl. Phys. A

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Improvement of transparent conductive indium tin oxide based multilayer films on p-silicon through the inclusion of thin copper-aluminium metals interlayer

Cited by 7 publications

References 29 publications

Multifunctional Zn-Doped ITO Sol–Gel Films Deposited on Different Substrates: Application as CO2-Sensing Material

Multifunctional Zn-Doped ITO Sol–Gel Films Deposited on Different Substrates: Application as CO2-Sensing Material

Structural, Optical, and Sensing Properties of Nb-Doped ITO Thin Films Deposited by the Sol–Gel Method

Tracking on crystallization process of doped metal oxide IATO to optimize solvothermal conditions

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