Improvement of Yttrium Oxyfluoride Coating with Modified Precursor Solution for Laser-Induced Hydrothermal Synthesis

Abstract

In the semiconductor manufacturing process, the inner walls of the equipment are coated with yttrium-based oxides for etch resistance against plasma exposure. Yttrium oxyfluoride (YOF) particle synthesis and coating methods have been actively studied owing to their high erosion resistance compared to Y2O3 and Al2O3. Owing to the formation of a rough and porous coating layer by thermal spray-coating, the coating layer disintegrates, as the etching process has been conducted for a long time. Laser-induced synthesis and coating technology offer several advantages, including simplified process steps, ease of handling, and formation of a dense coating layer on the target material. In this study, YOF was coated on an aluminum substrate using a modified precursor solution. The NaF and HMTA were added to the precursor solution, resulting in enhanced synthetic reactivity and stabilizing the oxides. The material coated on the surface was analyzed based on the characteristics of composition, chemical bonding, and phase identification. We found that the coating properties can be improved by using an appropriate combination of modified precursor solutions and laser parameters. Therefore, the findings in this study are expected to be utilized in the field of coating technology.

Evaluation of dental implant with hydroxyapatite coating by laser-induced hydrothermal synthesis: in vitro and in vivo experimental study

“…The photoheat generated by the laser on the substrate in the liquid precursor improves the adhesion of the HA coating through precipitation and growth of HA, and increases the corrosion resistance and cell adhesion of the substrate. In addition, various coating layers can be formed depending on the substate and solution used [19,20]. In previous studies that used Mg as the substate, Mg(OH) 2 is formed through a natural reaction in an aqueous solution, and Mg(OH) 2 can supply OH-that can form the HA surface.…”

“…Another study reported that surface coating does not occur with too weak laser pulses (5 and 10w) during the LISSC process. It was also observed that a solution which is a combination of NaF and HMTA was required for coating to be formed [19].…”

“…LISSC was newly developed by complementing the existing HA coating method using physical and chemical methods [19]. The LISSC process is as follows; substrates (Titanium:Ti or magnesium:Mg) in a supersaturated calcium and phosphate(CaP) solution are treated with a nanosecond pulsed laser -> HA penetrates into the molten substrate by the laser, forming a strong bond.…”