Improvement of YX42° Cut LiTaO3 SAW Filters with Optical Proximity Effect Correction Method

Abstract

Due to the influence of the optical proximity effect (OPE), it is easy for a pattern of photoresistance to be inconsistent with a design pattern, thus damaging the performance of a SAW resonator. To solve this problem, this paper proposes an optimization method for SAW filters based on optical proximity correction (OPC). This method can avoid the tip discharge problem of SAW filters by suppressing the problem of rounding and shrinking of dummy electrode and electrode tail caused by OPE. This method increases the quality factor (Q) of the SAW resonator and thus decreases the insertion loss of the SAW filter. The filter increases the bandwidth by 1.8 MHz at −1.5 dB after applying the OPC method. Additionally, it improves the stability of the filter under high power conditions.

Development and Validation of an ANN-Based Approach for Temperature-Dependent Equivalent Circuit Modeling of SAW Resonators

“…Surface acoustic wave (SAW) resonators are devices that utilize the properties of piezoelectric materials to convert mechanical vibrations on a solid surface into electrical signals, and vice versa. Due to their high performance and reliability, these devices are widely used in wireless communication systems for the implementation of filters and oscillators [ 1 , 2 , 3 ]. In recent years, SAW technology has gained significant attention in the scientific community as a highly researched topic, due to its outstanding potential for emerging applications in various fields.…”

“…These early SAW devices were primarily based on quartz crystal substrates and were utilized in radio communication systems and other high-frequency electronic devices. Over the years, SAW technology has undergone a significant evolution, with the development of new materials and fabrication techniques [ 1 , 2 , 6 , 7 , 8 ]. This has led to the creation of SAW devices with improved performance, increased functionality, and expanded application.…”