2018
DOI: 10.1080/02670844.2017.1341110
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Improvement on thermal stability of TiAlSiN coatings deposited by IBAD

Abstract: TiAlSiN coatings were deposited on Si substrates by ion beam-assisted deposition. The oxidation resistance and mechanism of TiAlSiN at 800°C, 900°C, and 1000°C under a nitrogen atmosphere were discussed and compared with those of TiAlSiN under argon and air atmospheres. The microstructure, bonding characteristics, and phase transition of the coatings were systematically investigated. The results indicated that nitrogen atmosphere effectively inhibited oxidation of the TiAlSiN coatings. The key reason for this … Show more

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Cited by 13 publications
(6 citation statements)
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“…This kind of microstructure can refine grains of TiAlN, and help improve the hardness of the coatings due to the Hall Patch effect [10][11][12]. Besides, a lot of papers demonstrate that the high-temperature oxidation resistance [13,14], thermal stability [15], and tribological behavior [16][17][18] of the coatings are improved after Si is added to TiAlN coatings.…”
Section: Introductionmentioning
confidence: 99%
“…This kind of microstructure can refine grains of TiAlN, and help improve the hardness of the coatings due to the Hall Patch effect [10][11][12]. Besides, a lot of papers demonstrate that the high-temperature oxidation resistance [13,14], thermal stability [15], and tribological behavior [16][17][18] of the coatings are improved after Si is added to TiAlN coatings.…”
Section: Introductionmentioning
confidence: 99%
“…The PBE functional form under the generalized gradient approximation (GGA) was used for all calculations, and the ultrasoft pseudopotential self-consistent field (SCF) was used to construct the pseudopotential [32][33][34]. The plane wave cutoff energy was 425 eV, and the self-consistent iteration was 500 times.…”
Section: Methodsmentioning
confidence: 99%
“…On the one hand, the hardness and wear resistance of the coating is improved due to the solid solution reaction of Si atoms and the refinement of grains [4][5][6]. On the other hand, the coating forms a typical nc-MeN/a-Si 3 N 4 structure and the oxidation formation of SiO 2 hinders the diffusion of elements, which enhances the high-temperature oxidation resistance of the coating [7][8][9][10]. However, during the deposition of AlCr-SiN coating, the alloying of Si and AlCrN will reduce the solid solubility limit of c-AlN in AlCrN and promote the formation of h-AlN during high temperature induced by working, consequently reducing the thermal stability of the coating [11,12].…”
Section: Introductionmentioning
confidence: 99%