ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC) 2023
DOI: 10.1109/essderc59256.2023.10268524
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Improving off-state capacitance of SOI-CMOS RF switches: how good are air microcavities?

Daniel Gheysens,
Alain Fleury,
Stéphane Monfray
et al.
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