Improving Priority Lot Cycle Times

Schmidt, Kilian

doi:10.1109/asmc.2007.4595694

Cited by 6 publications

(1 citation statement)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Over the last few years, a number of papers have focused on improving semiconductor production efficiency. (2,3) In contrast with these publications, very limited information is available on productivity improvements for research and development cleanrooms (4,5) or in facilities that are exercising a broad variety of fabrication process flows. Ramamurthi et al (4) described the analysis of production control methodologies and strategies for R&D fabs using simulations, while Pierce et al (5) investigated cycle time metrics related to cumulative queue and hold-time by equipment type.…”

Section: Introductionmentioning

confidence: 99%

Micro and Nano R&D Fab Performance and Productivity A Lean Six-Sigma Approach

et al. 2009

View full text Add to dashboard Cite

A lean six-sigma approach was utilized to improve the performance of a multi-technology R&D cleanroom facility at GE's Global Research Center (GRC). The lean initiative prioritized 4 areas for improvement: 1) fab loading and lot priority, 2) documentation, 3) equipment and, 4) maintenance. A set of four metrics (throughput, uptime, process time, and lot queue time) for each piece of equipment was utilized to measure and drive cleanroom operational performance improvements. Subsequent activities relied on more sophisticated analysis of these metrics as a basis for prioritizing additional improvement tasks. Projects that improved the data management systems, and lot process documentation were also completed.After implementing the improvements that were uncovered from the lean six-sigma approach, lot cycle time improved more than 3x in the best cases, while a 50% average reduction in equipment queue time was achieved. The initiative resulted in a 16% increase in productivity while overall fab loading grew by 25%. The cleanroom achieved lower research and development costs while simultaneously increasing technology capacity, reducing lot cycle times, and maintaining process control.

show abstract