Improving sensitivity of piezoresistive microcantilever biosensors using stress concentration region designs

Ansari, Mohd. Zahid; Cho, C; Choi, W. K.; Lee, M; Lee, S; Kim, J

doi:10.1088/0022-3727/46/50/505501

Cited by 15 publications

(7 citation statements)

References 25 publications

(31 reference statements)

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“…In this regard, static mode of measurement has advantages in terms of reduced dependency of measurement on external ambient and intrinsic material parameters, and better performance in liquid medium which is desirable for chemical and biological sensing applications. When operated in static mode with self-sensing piezoresistive readout, the performance of cantilever can be improved by incorporating stress concentration regions [ 89 – 92 ]. The stress concentration regions (SCRs) act as mechanical amplifiers of stress generated due to cantilever bending, thereby improving electrical sensitivity.…”

Section: Sensing Modesmentioning

confidence: 99%

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.

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Section: Sensing Modesmentioning

confidence: 99%

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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“…A series of studies have found that in contrast to the design of force-sensing cantilevers where a high-aspect-ratio design is preferred, surface stress sensing, in general, prefers a lowaspect-ratio geometry. 14) Moreover, designs with novel features such as vertically connected cantilevers, 15) cantilever arrays, 16) double-sided coating, 17) and stress-concentrating holes 18) are found to be effective in improving sensitivity. While these studies provide valuable insights, their scopes are limited as they focus exclusively on cantilevers with basic shapes.…”

Section: Introductionmentioning

confidence: 99%

Tailoring stresses in piezoresistive microcantilevers for enhanced surface stress sensing: insights from topology optimization

Zhuang,

Minami,

Shiba

et al. 2024

Jpn. J. Appl. Phys.

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In assessing piezoresistive microcantilever sensitivity for surface stress sensing, the key is its capacity to translate surface stress into changes in resistance. This change hinges on the interplay between stresses and piezoresistivity. Traditional optimization has been constrained by rudimentary 1D models, overlooking potentially superior designs. Addressing this, we employed topology optimization to optimize of Si(100) microcantilevers with a p-type piezoresistor. This led to optimized designs with up to 30% enhanced sensitivity over conventional designs. A recurrent "double-cantilever" configuration emerged, which optimizes longitudinal stress and reduces transverse stress at the piezoresistor, resulting in enhanced sensitivity. We developed a simplified model to analyze stress profiles in these designs. By adjusting geometrical features in this model, we pinpointed an ideal parameter combination for optimal stress distribution. Contrary to conventional designs favoring short cantilevers, our findings redefine efficient surface stress sensing, paving the way for innovative sensor designs beyond the conventional rectangular cantilevers.

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“…Piezoresistors are the simplest form of piezoresistive devices with several advantages: low cost, small size, low phase lag, and extensive dynamic range [14]. Besides, the main attractive features of piezoresistive sensors are their high sensitivity and selfsensing ability [15], which become indispensable for detecting low mass concentrations such as chemical, biochemical, and biological analytes.…”

Section: Introductionmentioning

confidence: 99%

Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

Setiono

Fahrbach

Deutschinger³

et al. 2021

Sensors

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An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing, e.g., high sensitivity, low cost, simple procedure, and quick response. However, a crosstalk effect is generated by the coupling of parasitic elements from the actuation part to the sensing part. This study presents a parasitic feedthrough subtraction (PFS) method to mitigate a crosstalk effect in an electrothermal piezoresistive cantilever (EPC) resonance sensor. The PFS method is employed to identify a resonance phase that is, furthermore, deployed to a phase-locked loop (PLL)-based system to track and lock the resonance frequency of the EPC sensor under cigarette smoke exposure. The performance of the EPC sensor is further evaluated and compared to an AFM-microcantilever sensor and a commercial particle counter (DC1100-PRO). The particle mass–concentration measurement result generated from cigarette-smoke puffs shows a good agreement between these three detectors.

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Improving sensitivity of piezoresistive microcantilever biosensors using stress concentration region designs

Cited by 15 publications

References 25 publications

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Tailoring stresses in piezoresistive microcantilevers for enhanced surface stress sensing: insights from topology optimization

Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

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