Improving the adhesion of diamond-like carbon films on glass substrate by chemical etching and oxygen plasma treatment

Zhou, Yongliu; Liu, Yuan; Song, Hui; Li, Junge; Shu, Yujie; He, Jianxiong; Jiang, Hong; Xiong, Chunrong

doi:10.1016/j.vacuum.2023.112629

Vacuum

2023

DOI: 10.1016/j.vacuum.2023.112629

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Improving the adhesion of diamond-like carbon films on glass substrate by chemical etching and oxygen plasma treatment

Yongliu Zhou,

Yuan Liu,

Hui Song

et al.

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Improving the adhesion of diamond-like carbon films on glass substrate by chemical etching and oxygen plasma treatment

Cited by 3 publications

References 35 publications

Annealing-induced defects and optical degradation in sputter-deposited silicon nitride: Implications for photonic applications

Annealing-induced defects and optical degradation in sputter-deposited silicon nitride: Implications for photonic applications

High-performance SiO2-SiNx distributed Bragg reflectors fabricated by ion-assisted reactive magnetron sputtering

Optical properties of low-pressure DC Ar plasma torch with N2–SiH4–B2H6 gas mixture injection for Si–B–N thin film deposition

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