Improving the growth of Ge/Si islands by modulating the spacing between screen and accelerator grids in ion beam sputtering deposition system

Abstract

Ge islands were fabricated on Si buffer layer by ion beam sputtering deposition with a spacing between the screen and accelerator grids of either 1 mm or 2 mm. The Si buffer layer exhibits mixed-phase microcrystallinity for samples grown with 1 mm spacing and crystallinity for those with 2 mm spacing. Ge islands are larger and less dense than those grown on the crystalline buffer because of the selective growth mechanism on the microcrystalline buffer. Moreover, the nucleation site of Ge islands formed on the crystalline Si buffer is random. Ge islands grown at different grid-to-grid gaps are characterized by two key factors, namely, divergence half angle of ion beam and crystallinity of buffer layer. High grid-to-grid spacing results in small divergence half angle, thereby enhancing the sputtering energy and redistribution of sputtered atoms. The crystalline volume fraction of the microcrystalline Si buffer was obtained based on the integrated intensity ratio of Raman peaks. The islands show decreased density with decreasing crystalline volume fraction and are

High Curie Temperature Achieved in the Ferromagnetic MnxGe1−x/Si Quantum Dots Grown by Ion Beam Co-Sputtering

“…In the process, these QDs can be formed on the Si buffer layer by self-assembly via the Stranski-Krastanov (SK) growth mode, proving that IBSD is also an epitaxial growth technology. [18] Therefore, the growth of Ge/Si QDs by IBSD has been studied in detail [20,22,25]. In our work, MnGe/Si QDs with different Mn doping levels are prepared by IBSD.…”

“…Ion beam sputtering deposition (IBSD) is crucial for preparing high-quality thin films, demonstrating that high-quality epitaxial thin films and low dimensional nanomaterials could actualize through IBSD [17][18][19][20][21]. More importantly, the stress and relaxation in these lattice-mismatched nanostructures can be well-tuned by IBSD [22].…”

Study on the Microgrid Pluripotent Complementary and Comprehensive Economic Optimization Planning Based on Virtual Energy Theory

“…Micro grid consists of photovoltaic, wind power, diesel power generation, water power, various energy storage and other forms of energy [7], [8], [9]. The distributed generation can build the micro grid under certain resource input.…”

Nano Ball‐Milling Using Titania Nanoparticles to Anchor Cesium Lead Bromine Nanocrystals and Energy Transfer Characteristics in TiO2@CsPbBr3 Architecture

“…In past few years, all-inorganic lead halide perovskite nanocrystals (NCs) have gained extensively attention due to their relatively facile synthetic methods and distinct luminescence characteristics compared to other NCs and quantum dots. [1][2][3][4][5] As an outstanding candidate of photoluminescent materials, the characters of carrier transport in CsPbX 3 are modulated by the interfacial electronic states, and band structure between the heterogeneous crystalline materials and CsPbX 3 NCs, which can further tune and improve their photoluminescence characteristics. [6][7][8][9][10] For example, CsPbX 3 heterojunctions with Au, Ag, MoS 2 , PbS , and Bi 2 Se 3 have been studied in order to improve their stability and luminous performance.…”