2020
DOI: 10.1088/2632-959x/abcae0
|View full text |Cite
|
Sign up to set email alerts
|

Improving the reliability of conductive atomic force microscopy-based electrical contact resistance measurements

Abstract: Electrical contact resistance (ECR) measurements performed via conductive atomic force microscopy (C-AFM) suffer from poor reliability and reproducibility. These issues are due to a number of factors, including sample roughness, contamination via adsorbates, changes in environmental conditions such as humidity and temperature, as well as deformation of the tip apex caused by contact pressures and/or Joule heating. Consequently, ECR may vary dramatically from measurement to measurement even on a single sample t… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
10
1

Year Published

2021
2021
2024
2024

Publication Types

Select...
6
1

Relationship

2
5

Authors

Journals

citations
Cited by 10 publications
(11 citation statements)
references
References 34 publications
0
10
1
Order By: Relevance
“…A key reason behind this limitation is the wear of the conducting tip coating. 35 For the current study, we explored different types of commercially available conductive tips, including PtSi, Ti/Ir, and dopeddiamond-coated conductive tips. We could only achieve lattice resolution on an HOPG sample with PtSi tips (please see Figure S2A).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…A key reason behind this limitation is the wear of the conducting tip coating. 35 For the current study, we explored different types of commercially available conductive tips, including PtSi, Ti/Ir, and dopeddiamond-coated conductive tips. We could only achieve lattice resolution on an HOPG sample with PtSi tips (please see Figure S2A).…”
Section: Resultsmentioning
confidence: 99%
“…Despite its potential, the C-AFM technique has traditionally suffered from poor reproducibility. A key reason behind this limitation is the wear of the conducting tip coating . For the current study, we explored different types of commercially available conductive tips, including PtSi, Ti/Ir, and doped-diamond-coated conductive tips.…”
Section: Resultsmentioning
confidence: 99%
“…Conduction at single asperity contacts can be measured experimentally using conductive atomic force microscopy (C-AFM). C-AFM has been used to study ECR of various material systems including thin SiO 2 films grown on doped Si substrates [21], HOPG [22,23], carbon nanotubes [24,25], self-assembled monolayers of organic molecules on gold [26], and gold islands on HOPG [27]. However, such studies have not investigated the time dependence of ECR at the nanoscale.…”
Section: Introductionmentioning
confidence: 99%
“…. humidity and temperature, as well as deformation of the tip apex caused by contact pressures and/or Joule heating" [236]. Switching from ambient to dry nitrogen atmosphere is suggested to resolve most issues; additionally annealing and a higher contact force (> 30 nN) also improve the reliability.…”
Section: Water Adsorption In Ambient Atmospherementioning
confidence: 99%
“…Another source for reliability and reproducibility issues stated by Sumaiya et al is sample roughness [236]. The use of an evaporated gold film on a chromium adhesion layer as a substrate for the WS 2 flake in the second sample was meant to render the photolithography processing unnecessary, due to issues detailed in Sect.…”
Section: Substrate Roughnessmentioning
confidence: 99%