The deformation behavior of boron‐ and carbon‐doped β‐silicon carbide (B,C‐SiC) with an average grain size of 260 ± 18 nm containing 1 wt% boron was investigated by compression testing at elevated temperatures. Extensive grain growth during deformation was observed. The stress–strain curves were compensated for grain growth by assuming power‐law type of dependence on grain size and strain rate. The stress exponent n was ∼1.3 and the grain size exponent p was ∼2.7 at temperatures ranging from 1593° to 1758°C. The apparent activation energy of deformation Qd was ∼760 kJ/mol, which was lower than the activation energy for lattice diffusion of silicon and carbon in SiC and higher than that for grain‐boundary diffusion of carbon in SiC. These results suggest that the deformation mechanism of the fine‐grained B,C‐SiC is grain‐boundary sliding accommodated by the grain‐boundary diffusion.