Impurity Detection Method for High-Purity BCl₃

Abstract

A method for detecting impurities in high purity BCl3 was described in the present work. GC, ICP-MS, FTIR and colorimetric method were applied to analyze high-purity BCl3. The quantitative results of the impurities such as N2, CO, CO2 and Fe demonstrated that these methods had excellent repeatability (RSD<3%), reproducibility. The ICP-MS detection accuracy can achieve ppb limiter. The FTIR method provided opportunities for the determination of HCl, COCl2, which have difficulties in quantification with other method.