atoms of the active metal, electrically connecting both electrodes through the solid electrolyte. [11] The formation of this filament is preceded by (partial) oxidation of the active electrode under positive bias. Because of field accelerated transport, the so-formed cations are migrating through the solid electrolyte thin film (e.g., Ta 2 O 5 , HfO 2 , or SiO 2 ) toward the counter electrode. The cations are reduced at the negatively charged counter electrode and form a nucleus facilitating further fast filament growth. Filament growth continues until short circuit conditions are reached and the driving forces for the electrochemical redox processes and ion migration are diminished. The transition from the high resistive state (HRS) into a low resistive state (LRS) is the SET process. When a negative bias is applied to the active electrode, the filament is disrupted and driven by same forces, but in opposite direction it is assumed to be completely dissolved. The device is switched from LRS to HRS that is the RESET.Since electrochemical electrode processes are spatially separated, SET event requires a counter electrode reaction at the CE to keep overall electroneutrality of the system. For most oxide-based solid electrolytes, this counter reaction involves a reduction of moisture, incorporated in the films from the ambient or during preparation steps (e.g., lithography, rinsing, atomic layer deposition (ALD) deposition, etc.). Reduction of water is kinetically favorable compared to reduction (and decomposition) of the oxide itself [12] and therefore the redox processes related to moisture can be a limiting factor for the switching kinetics. [13] Furthermore, incorporated moisture can also enhance the cation mobility. [14] In ECM devices, typically silver or copper electrodes are used. In addition, metals such as Ti [15] or alloys/compounds have been suggested as active electrodes. [16,17] The advantage of these alternative systems is considered to be the direct supply of mobile ions, avoiding the necessity of direct electrode oxidation and related energy consumption. However, in most of the cases the choice of active electrode materials is based mainly on empirical observations and the electrochemical properties of the materials toward oxidation and reduction have not been considered.In this work, we investigate the electrochemical redox behavior of several metals covering a range from noble to transition metals (Ag, Al, Au, Cu, Fe, Ni, Ta Ti, V, and Zr) as active electrode materials using Me/SiO 2 /Pt system. Cyclic voltammetry (CV) measurements are used to provide information on the redox processes occurring prior to the switching events. In addition, we performed I-V switching experiments with three different thicknesses of the solid electrolyte down to 5 nm Electrochemical metallization cells rely on oxidation, reduction, and migration of metal cations in nanoscale thin films. The cations are typically provided by the oxidation of the active electrode. Commonly, Cu, Ag, or their compounds are used as electro...