In/Pd-Doped SnO ₂ -Based CO Micro-Structure Sensor with High Sensitivity and Quick Response

Abstract

In/Pd-doped SnO2 is synthesized via a sol-gel method and coated on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. The sensor can be used to detect CO down to 1 ppm (the sensitivity is about 3), and the response time and recovery time are about 5 and 15 s, respectively. Excellent selectivity is also found based on our sensor. These results demonstrate a promising approach to fabricate high-performance CO sensors with high sensitivity and quick response.

Effects of rapid thermal annealing on the room-temperature NO2-sensing properties of WO3thin films under LED radiation

“…[8] In/Pddoped SnO 2 was synthesized via a sol-gel method and coated on a silicon substrate with Pt electrodes to fabricate a microstructure sensor. [9] In recent years, some composite materials have been synthesized to detect many kinds of gas. For example, excellent CH 4 sensing properties are found in In-Pd-Co-SnO 2 composite nanofiber micro-sensors, which have been synthesized using an electrospinning method.…”