In-Plane MEMS Shallow Arch Beam for Mechanical Memory

Hafiz, Abdullah Al; Kosuru, Lakshmoji; Ramini, Abdallah; Chappanda, Karumbaiah N.; Younis, Mohammad I.

doi:10.3390/mi7100191

Cited by 41 publications

(20 citation statements)

References 48 publications

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“…In previous works, we demonstrated the tunability of arch shaped beams [5][6] with various actuation mechanisms, electrothermal and electrostatic, and for various applications, such as logic [3], memory [40] and filtering [4]. These investigations were mainly experimental.…”

Section: Introductionmentioning

confidence: 99%

The static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapes

Hajjaj

Alcheikh

Younis

2017

International Journal of Non-Linear Mechanics

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We investigate experimentally and analytically the effect of initial shapes, arc and cosine wave, on the static and dynamic behavior of microelectromechanical systems (MEMS) arch resonators. We show that by carefully choosing the geometrical parameters and the initial shape of the arch, the veering phenomenon (avoided-crossing) among the first two symmetric modes can be strongly activated. To demonstrate this, we study electrothermally tuned and electrostatically driven initially curved MEMS resonators. Upon changing the electrothermal voltage, we demonstrate high frequency tunability of arc resonators compared to the cosine-configuration resonators for the first and third resonance frequencies. For arc beams, we show that the first resonance frequency increases up to twice its fundamental value and the third resonance frequency decreases until getting very close to the first resonance frequency triggering the veering phenomenon. Around the veering regime, we study experimentally and analytically the dynamic behavior of the arc beam for different electrostatic loads. The analytical study is based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The veering phenomenon is also confirmed through a finite-element multi-physics and nonlinear model.

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Section: Introductionmentioning

confidence: 99%

The static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapes

Hajjaj

Alcheikh

Younis

2017

International Journal of Non-Linear Mechanics

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“…In transistors and static actuation based M/NEMS logic gates, the 'presence (absence)' of DC current is used to define the '1 (0)' Boolean output states. Alternately, dynamic actuation based M/NEMS logic gates use the 'presence (absence)' of motional current due to the 'resonating (non-resonating)' states of the device for defining the '1 (0)' Boolean output states [9][10][11][12][13][14][15][16][17][18][19]. Masmanidis et al [17] demonstrated the first scalable dynamically actuated mechanical logic gate (XOR) using two electrically isolated but mechanically connected (in an L-shape) piezoelectric nano-cantilevers.…”

Section: Introductionmentioning

confidence: 99%

Micro-mechanical resonators for dynamically reconfigurable reduced voltage logic gates

Chappanda¹,

Ilyas²,

Younis³

2018

J. Micromech. Microeng.

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Due to the limitations of transistor based logic devices such as their poor performance at elevated temperature, alternative computing methods are being actively investigated. In this work, we present electromechanical logic gates using electrostatically coupled in-plane micro-cantilever resonators operated at modest vacuum conditions of 5 Torr. Operating in the first resonant mode, we demonstrate 2-bit XOR, 2and 3-bit AND, 2-and 3-bit NOR, and 1-bit NOT gates; all condensed in the same device. Through the designed electrostatic coupling, the required voltage for the logic gates is reduced by 80 %, along with the reduction in the number of electrical interconnects and devices per logic operation (contrary to transistors). The device is dynamically reconfigurable between any logic gates in real time without the need for any change in the electrical interconnects and the drive circuit. By operating in the first two resonant vibration modes, we demonstrate mechanical logic gates consisting of two 2-bit AND and two 2-bit XOR gates. The device is tested at elevated temperatures and is shown to be functional as a logic gate up to 150 o C. Also, the device has high reliability with demonstrated lifetime greater than 5 x 10 12 oscillations.

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“…MEMS devices due to their smallsize and high sensitivities are widely utilized in sensors and actuators [9], miniature gyroscopes [10], micro-satellites [11], accelerometers [12], bio-MEMS [13], chemical sensors [14] and many other industrial applications. Among the most practical MEMS structures, arch shaped MEMS due to their interesting dynamics have been recently used as optical and digital mirrors, micro-relays, mechanical memories, [15] and micro-resonators [16]. These micro-scale structures show bi-stable behavior characterized by multi-valued curves in their load-deflection diagrams.…”

Section: Introductionmentioning

confidence: 99%

One-to-One and Three-to-One Internal Resonances in MEMS Shallow Arches

Ouakad

Sedighi

Younis

2017

Journal of Computational and Nonlinear Dynamics

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The nonlinear modal coupling between the vibration modes of an arch-shaped microstructure is an interesting phenomenon, which may have desirable features for numerous applications, such as vibration-based energy harvesters. This work presents an investigation into the potential nonlinear internal resonances of a microelectromechanical systems (MEMS) arch when excited by static (DC) and dynamic (AC) electric forces. The influences of initial rise and midplane stretching are considered. The cases of one-to-one and three-to-one internal resonances are studied using the method of multiple scales and the direct attack of the partial differential equation of motion. It is shown that for certain initial rises, it is possible to activate a three-to-one internal resonance between the first and third symmetric modes. Also, using an antisymmetric half-electrode actuation, a one-to-one internal resonance between the first symmetric and the second antisymmetric modes is demonstrated. These results can shed light on such interactions that are commonly found on micro and nanostructures, such as carbon nanotubes.

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In-Plane MEMS Shallow Arch Beam for Mechanical Memory

Cited by 41 publications

References 48 publications

The static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapes

The static and dynamic behavior of MEMS arch resonators near veering and the impact of initial shapes

Micro-mechanical resonators for dynamically reconfigurable reduced voltage logic gates

One-to-One and Three-to-One Internal Resonances in MEMS Shallow Arches

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