2020
DOI: 10.1002/aelm.202000209
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In Quest of Nonfilamentary Switching: A Synergistic Approach of Dual Nanostructure Engineering to Improve the Variability and Reliability of Resistive Random‐Access‐Memory Devices

Abstract: This study demonstrates a synergistic approach of dual nanostructure engineering to improve the performance of AlOx‐based resistive random access memory (RRAM) devices. More precisely, a novel material stack engineering of RRAM with nonlinear area scalable low current switching and extensive improvement of reliability and variability issues is reported. Dual nanostructures (nanodome bottom electrode and nanocrystals in switching layer) in RRAM is an effective way to change the switching from filamentary to a n… Show more

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Cited by 38 publications
(21 citation statements)
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“…Notably, the operating currents are significantly reduced despite increased pulse voltage amplitudes for SET and RESET processes in Ag/TiO 2 /ZrN/Si device. In the literature, for the phenomena in which the gradual characteristics are improved according to the additional layer insertion [ 38 , 39 ], the operation polarity change [ 40 ] and dielectric thickness control [ 41 ] of the device were reported.…”
Section: Resultsmentioning
confidence: 99%
“…Notably, the operating currents are significantly reduced despite increased pulse voltage amplitudes for SET and RESET processes in Ag/TiO 2 /ZrN/Si device. In the literature, for the phenomena in which the gradual characteristics are improved according to the additional layer insertion [ 38 , 39 ], the operation polarity change [ 40 ] and dielectric thickness control [ 41 ] of the device were reported.…”
Section: Resultsmentioning
confidence: 99%
“…A number of technologies have been proposed to realize the persistent memory and to deal with challenges [3][4][5]20,21]. Intel Optane DC Persistent Memory (DCPM) is the first commercially available persistent memory released in April 2019 [6].…”
Section: Persistent Memorymentioning
confidence: 99%
“…Resistive random-access memory (RRAM) is one of the strongest candidates for the next-generation nonvolatile memory technology due to low power consumption [ 1 ], fast switching speed [ 2 ], good complementary metal–oxide–semiconductor (CMOS) compatibility [ 3 , 4 , 5 ], and high scalability [ 6 ]. Until now, RRAM has been developed to focus on its applications such as high-density memory, embedded memory, and neuromorphic system.…”
Section: Introductionmentioning
confidence: 99%