In situ absolute surface metrology for a 600 mm aperture interferometer

Zhou, You; Liu, Shijie; Lu, Qi; Bai, Yunbo; Wu, Fenxiang; Shao, Jianda

doi:10.1016/j.optlaseng.2020.106054

Cited by 18 publications

(4 citation statements)

References 15 publications

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“…Moreover, we added a rotatable auxiliary flat mirror to maintain the two flat standard mirrors of the interferometer without rotation or replacement and designed a large-aperture high-precision flat-mirror rotation device. Figure 3  denotes the rotation angle of the auxiliary flat mirror [10][11][12] .…”

Section: Absolute Flat Testmentioning

confidence: 99%

High-precision surface form measurement of meter-scale optical flat

Bai

Qiao

Sun

et al. 2022

Thirteenth International Conference on Information Optics and Photonics (CIOP 2022)

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Optical flats used to realize pulse compression grating in ultra-intense and ultra-fast laser systems are large and have stringent face form requirements. This study employed an interferometer with an optical aperture of Φ800 mm to meet the demand for high-precision surface form measurements of meter-scale optical flats. The measurement accuracy of this interferometer improved using absolute surface form measurement. In addition, the full-aperture reflection surface form measurement of meter-scale optical flats was realized by exploiting sub-aperture stitching technology. The absolute measurement principle, based on the combination of rotational averaging and parity function, was used to calibrate the system error of the interferometer for absolute surface form measurement. The absolute surface form peak-to-valley (PV) repeatability (2σ) of the calibrated interferometer system error was 1.96 nm, and the root mean square (RMS) repeatability (2σ) was 0.44 nm. The calibration results show that the absolute surface-form measurement technique can effectively remove the interferometer system error and improve the surface-form measurement accuracy of the optical flat. The calibrated interferometer was then used to perform a two-dimensional stitching inspection of the meter-scale optical flat. The repeatability (2σ) of the PV value was 21.52 nm, whereas the repeatability (2σ) of the RMS value was 4.43 nm for a 1,680 × 1,100 × 200 mm flat. The measurement results show that the high-precision surface form measurement of meterscale optical flats was realized.

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Section: Absolute Flat Testmentioning

confidence: 99%

High-precision surface form measurement of meter-scale optical flat

Bai

Qiao

Sun

et al. 2022

Thirteenth International Conference on Information Optics and Photonics (CIOP 2022)

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“…Only one-dimensional absolute surface error data in both horizontal and vertical directions can be obtained when it was first proposed [2] and then optimized by utilizing the Zernike polynomial fitting, the full aperture surface error is able to be reconstructed [3] . Since then, many valuable researches on the three-mirror absolution measurement have been done, such as the N-rotation averaging absolute measurement method [4][5][6] , odd-even function absolute measurement method [7] and oblique incidence method with iterative algorithm [8][9] . To achieve highly precise and repeatable absolute measurements of low-frequency surface errors, especially for apertures above Φ600mm, it is essential to simplify experimental procedures, minimize mirror rotation and translation times and reduce measurement errors.…”

Section: Introductionmentioning

confidence: 99%

Absolute flatness measurement based on shift-rotation method using the second deviation

Zhang

Chen

Liu

et al. 2023

Optical Measurement Systems for Industrial Inspection XIII

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Environmental disturbance caused by mechanical vibration, air turbulence and thermal stratification makes a great impact on the accuracy of absolute flatness measurement, especially for the optical elements with the aperture larger than 600mm. Simplification of the measurement procedure is crucial for ensuring high precision and repeatability measurements. In this paper, the absolute flatness measurement approach combing the shift-rotation method and the second derivative method in polar coordinates is proposed to improve the stability and error tolerance of absolute measurement. The second derivative of the azimuth angle is achieved by rotating the tested flat, while that of the radial direction is achieved by translating high-order Zernike fitting. The absolute surface shape can be calculated simply by integration. The experiment procedure is simplified to two rotations and two translations with two involved mirrors. Furthermore, expanding the wavefront error to second-order can reduce the influence of environmental disturbance and make the measurement more robust. This study may provide technical support on the absolute flatness measurement for large aperture.

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“…The Fizeau interferometer is a nano-precision non-contact testing instrument for high-end optics, such as manufacturing, astronomy, and energy, which can quickly and nondestructively obtain the information of the measured optical elements 3,4 . Due to the rapid development of the above fields, the traditional Fizeau interferometer with small-aperture and single-beam can no longer meet the increasingly high inspection requirements of surface quality of optical elements [5][6][7] . At present, absolute measurement is the most effective and accurate method to realize real surface inspection, while the influence of spatial frequency transfer characteristics on the accuracy of quality assessment for optics must also be considered.…”

Section: Introductionmentioning

confidence: 99%

Measurement and analysis of a 4″-18″ aperture dual-beam Fizeau interferometer

Shen,

Yang,

Han

et al. 2023

Optical Metrology and Inspection for Industrial Applications X

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In situ absolute surface metrology for a 600 mm aperture interferometer

Cited by 18 publications

References 15 publications

High-precision surface form measurement of meter-scale optical flat

High-precision surface form measurement of meter-scale optical flat

Absolute flatness measurement based on shift-rotation method using the second deviation

Measurement and analysis of a 4″-18″ aperture dual-beam Fizeau interferometer

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