In-situ analysis of laser-induced breakdown spectra for online monitoring of femtosecond laser machining of sapphire

Shangguan, ShiYong; Zhang, JianGuo; Li, ZhanZhu; Shi, Wei; Wang, WenKe; Qi, DongFeng; Zheng, HongYu

doi:10.1007/s11431-023-2499-0

Sci. China Technol. Sci.

2023

DOI: 10.1007/s11431-023-2499-0

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In-situ analysis of laser-induced breakdown spectra for online monitoring of femtosecond laser machining of sapphire

ShiYong Shangguan,

JianGuo Zhang,

ZhanZhu Li

et al.

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In-situ analysis of laser-induced breakdown spectra for online monitoring of femtosecond laser machining of sapphire

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References 37 publications

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