In Situ Characterization of Triboelectrochemical Effects on Topography of Patterned Copper Surfaces

Joo, Sukbae; Liang, Hong

doi:10.1007/s11664-013-2486-2

Cited by 5 publications

(2 citation statements)

References 24 publications

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“…First of all, non-destructive methods were implemented in order to determine basic surface and bulk parameters, and precisely select a large sub-area of homogeneity (LSAH) with systematic pattern. These observations seem to be a good complement to other interdisciplinary studies in the field of triboelectrochemical effects, in which one tries to find correlation between surface topography and electrochemical processes on the surface [37], including electrical field under contacts effects [38]. The authors are convinced that the presented research gives an insight on better understanding the parasitic effects in micro-and nanoelectronics composed of A III B V semiconductor structures, for which p+ type InAs is often one of the sub-contact layers.…”

Section: Introductionmentioning

confidence: 69%

Multi-technique characterisation of InAs-on-GaAs wafers with circular defect pattern

2024

Opto-Electronics Review

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The article presents the results of diameter mapping for circular-symmetric disturbance of homogeneity of epitaxially grown InAs (100) layers on GaAs substrates. The set of acceptors (beryllium) doped InAs epilayers was studied in order to evaluate the impact of Be doping on the 2-inch InAs-on-GaAs wafers quality. During the initial identification of size and shape of the circular pattern, non-destructive optical techniques were used, showing a 100% difference in average roughness between the wafer centre and its outer part. On the other hand, no volumetric (bulk) differences are detectable using Raman spectroscopy and highresolution X-ray diffraction. The correlation between Be doping level and circular defect pattern surface area has been found.

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Section: Introductionmentioning

confidence: 69%

Multi-technique characterisation of InAs-on-GaAs wafers with circular defect pattern

2024

Opto-Electronics Review

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“…We have recently developed a novel approach using tribo-electrochemical principles to study material removal and degradation. 13,16 A setup containing a tribometer and a potentiostat was assembled for this purpose. The electrochemical impedance spectroscopy (EIS) was used as an analytical tool to evaluate the surface chemical conditions.…”

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confidence: 99%

In Situ Tribo-Electrochemical Evaluation of Wear of Diamond Composites

Xiao¹,

Lin²,

Liang³

2014

J. Electrochem. Soc.

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Real-time detection of wear between a rubbing pair is of critical significance for the performance and safety of industrial systems. In this research, a tribo-electrochemical method is developed to in situ monitor the friction and wear of diamond materials. The electrochemical impedance and current density were measured under the influence of friction between a pin against a disk of the same diamond composite. It was discovered that the current density is a function of the excitation voltage in a sinusoidal pattern. This was due to the synergetic effects of the amorphization-wear process of diamond. The amplitude and period of the sinusoidal pattern reflect the intensity and the frequency of the process. This electrochemical approach could be used to evaluate the friction and wear of an insulating material in situ, which has not been possible until this study. This research proposes new avenue in the evaluation of electrochemical wear of a hard diamond composite.

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Experimental study on correcting the contour error of a rotary surface machined by electrochemical mechanical machining

Pang

Chen

Fan

et al. 2019

Int J Adv Manuf Technol

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In Situ Characterization of Triboelectrochemical Effects on Topography of Patterned Copper Surfaces

Cited by 5 publications

References 24 publications

Multi-technique characterisation of InAs-on-GaAs wafers with circular defect pattern

Multi-technique characterisation of InAs-on-GaAs wafers with circular defect pattern

In Situ Tribo-Electrochemical Evaluation of Wear of Diamond Composites

Experimental study on correcting the contour error of a rotary surface machined by electrochemical mechanical machining

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