In-situ deflectometic measurement of transparent optics in precision robotic polishing

Ye, Junqiang; Niu, Zhenqi; Zhang, Xiangchao; Wang, Wei; Xu, Min

doi:10.1016/j.precisioneng.2020.03.011

Cited by 22 publications

(7 citation statements)

References 17 publications

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“…Emanuele et al [6] equipped the robotic workcell with two depth sensors for a polishing operation of metallic surfaces, based on abrasive finishing and fluid jet polishing technologies. Ye et al [7]developed the In-situ deflectometric measurement system for robotic polishing of optical components. Xu et al [8] developed a novel custombuilt hybrid robot to realize automated freeform polishing.…”

Section: Introductionmentioning

confidence: 99%

A robot intelligent polishing system for fiber reinforced plastics (FRP) material combined with online measurement

Yang,

2024

Preprint

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Fiber Reinforced Plastics (FRP) are extensively employed in the fabrication of mannequins. However, the manual polishing process of FRP is characterized by a deficiency in efficiency and poses detrimental effects on the workforce. An industrial robot combined with an online measurement method is proposed for polishing the surface of the mannequin arm made of FPR material. In this paper, the factors affecting the removal depth of FRP materials are discussed by establishing a mathematical model. Based on the simulation analysis, the removal depth and the range of machining parameters are derived. The online measuring device manufactured by Keyence model LJ-X8200 is mounted on the flange of an ABB IRB6700 industrial robot, which obtains the 3D digital data from arm surface before and after the polishing process. A sub-regional hand-eye calibration is applied to establish the spatial transformation matrix from the sensor coordinate to the workpiece coordinate to refine the calibration range and accuracy. Then, the processing data points are extracted by equal interval and coplanar method. In addition, the robot processing posture is obtained from the surface fitting curve based on the least square method. Finally, the polishing processing experiments are performed to analyze robot intelligent location recognition and verify the surface removal effect based on the optimum polishing parameters. Comparing the 3D measuring data before and after the polishing process, it is shown that the average value of workpiece surface roughness has been reduced to 2.518µm.

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Section: Introductionmentioning

confidence: 99%

A robot intelligent polishing system for fiber reinforced plastics (FRP) material combined with online measurement

Yang,

2024

Preprint

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“…In this paper, the phase-measuring deflectometric microscopy (PMDM) is adopted for the fast measurement of micro scaled defects on specular surfaces. Phase Measuring Deflectometry (PMD) is a powerful measurement tool, which specifies the surface slopes based on the law of reflection/refraction and then reconstructs the surface form by 2 > REPLACE THIS LINE WITH YOUR MANUSCRIPT ID NUMBER (DOUBLE-CLICK HERE TO EDIT) < integrating the gradients [15]. A microscopic objective lens can be employed to improve the lateral resolution.…”

Section: Introductionmentioning

confidence: 99%

Fast Measurement of Surface Topographies Using a Phase-Measuring Deflectometric Microscopy

Zhang

Lang

et al. 2023

IEEE Photonics J.

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With the fast development in the fields of photovoltaics and integrated circuits, the measurement of surface topographies and micro-scaled defects has attracted intensive interests. However, existing measurement methods are timeconsuming and unsuitable for in-situ detection. Therefore, a fast topographic measurement method is developed based on the deflectometric microscope system. Microscopic deflectometry is an attractive tool due to its high sensibility to surface slopes and large dynamic range of measurement. For the quantitative reconstruction of surface topographies from slopes, an integration method is developed based on the minimum spanning tree, and the integration path is designed based on a sparse representation and a curl map. The robustness and accuracy of the integration method are validated by numerical simulation and experiments. This method can achieve a high measurement accuracy with a high lateral resolution and a depth of field of 90 μm, hereby improving the manufacturing efficiency and quality of opto-electronics functional devices.

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“…In terms of measuring principle, they can be divided into optical microscope method, angle-resolved light scattering method [4], capacitance method, laser interferometry method [5], confocal detection method [6] etc. In order to eliminate the error caused by the secondary clamping of the parts, it is necessary to adopt on-line or on-machine measurement methods [7,8] to ensure accuracy of the parts.…”

Section: Introductionmentioning

confidence: 99%

On-machine measurement and temperature compensation method of NURBS surface interpolation for semicircular narrow neck thickness based on ultra-precision machine tool

Jin¹,

Gao²,

Li³

et al. 2022

Meas. Sci. Technol.

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Flexible joint is a typical low-rigidity micro part, which has four narrow neck structures evenly distributed around its central axis. In the ultra-precision machining process, It is crucial to control the dimensional accuracy of the narrow necks to improve stiffness consistency. However, the limited space of the neck structures and the high accuracy requirements bring extremely difficulties to the measuring process. In this paper, a novel on-machine measurement method for the semicircular narrow necks was presented and a measuring device was developed based on the combination of high linearity incremental measurement method and on-machine measurement technology. Moreover, the uncertainty of measurement error was analyzed in detail. In view of the measurement error caused by temperature drift, a compensation method based on non-uniform rational B-spline (NURBS) surface interpolation was used to enhance the measurement accuracy. The experimental results showed that the measurement accuracy enhanced over 30% after compensation, which met the measuring requirement of flexible joint.

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In-situ deflectometic measurement of transparent optics in precision robotic polishing

Cited by 22 publications

References 17 publications

A robot intelligent polishing system for fiber reinforced plastics (FRP) material combined with online measurement

A robot intelligent polishing system for fiber reinforced plastics (FRP) material combined with online measurement

Fast Measurement of Surface Topographies Using a Phase-Measuring Deflectometric Microscopy

On-machine measurement and temperature compensation method of NURBS surface interpolation for semicircular narrow neck thickness based on ultra-precision machine tool

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