In-Situ Electrical Characterization of Low Temperature Getter Thin Films Activation

Abstract

Non-evaporable getter materials based on transition metal alloys (Zr, V, Co, Fe, etc…) are reactive materials able to sorb species like O, N, H or C. Integrated as thin films inside MEMS packages under vacuum, they can compete with desorption during bonding and leaks during time. Their thermo-electrical characteristics under varying atmospheres reflect the evolution of the microstructure and is dependent on the sorption properties. In this frame, 4-probes electrical resistivity measurements have been performed on different getter binary alloys under partial vacuum as a function of the temperature to investigate their activation and evolution.