Understanding the mechanisms involved in chemical vapour deposition (CVD) synthesis of atomically thin transition metal dichalcogenides (TMDCs) requires the precise control of numerous growth parameters. All the proposed mechanisms and their relation to the growth conditions are inferred from characterising intermediate formations obtained by stopping the growth blindly. To fully understand the reaction routes that lead to the monolayer formation, real time observation and control of the growth are needed. Here, we demonstrate how a custom-made CVD chamber that allows real time optical monitoring can be employed to study the reaction routes that are critical to the production of the desired layered thin crystals in salt assisted TMDC synthesis. Our real time observations reveal the reaction between the salt and the metallic precursor to form intermediate compounds which lead to the layered crystal formation. We identified that both the vapour-solid-solid and vapour-liquid-solid growth routes are in an interplay. Furthermore, we demonstrate the role H2 plays in the saltassisted WSe2 synthesis. Finally, we guided the crystal formation by directing the liquid intermediate compound through pre-patterned channels. The methods presented in this article can be extended to other materials that can be synthesized via CVD.
Main Text:Chemical vapour deposition (CVD) synthesis of two-dimensional (2D) transition metal dichalcogenides (TMDCs) involves deposition of gaseous precursors on to a substrate to facilitate the crystallization in the desired crystal structure 1,2,3,4,5 . In a typical CVD synthesis, a transition metal containing precursor is placed in a tube furnace with a chalcogen precursor and a target substrate. Ar/H2 mixture carries the vaporised chalcogen precursor and the metal compounds to form atomically thin layers on the target substrate. Salts are also added to the conventionally used metal oxide precursors to form more volatile intermediate compounds 6,7,8 . This increases the monolayer formation rate and allows the synthesis of otherwise difficult to synthesize 2D TMDCs 9 . The setup described above has been used to produce atomically thin TMDC crystals in various morphologies. However, optimization of the growth parameters requires blind trial and errors, and even the optimized recipes offer limited control in terms of number of layers, crystal phase and morphology.There are two growth modes in CVD synthesis of TMDCs. (1) Vapour-Solid-Solid (VSS): Vaporized precursors are adsorbed on the substrate and form crystals via surface diffusion and bond formation at an elevated temperature 10 , and (2) Vapour-Liquid-Solid (VLS): Supersaturated liquid droplets containing the constituent elements form the crystals 11 . Figure 1a depicts these growth modes. Despite many studies on the CVD growth mechanisms of few layer TMDCs, it is unclear which growth mode prevails under different growth conditions. The